We demonstrate electrostatically actuated end-coupled optical waveguide devices in the indium phosphide (InP) material system. The design of a suitable layer structure and fabrication process for actuated InP-based waveguide micro-electro-mechanical systems (MEMS) is reviewed. Critical issues for optical design, such as coupling losses, are discussed and their effect on device performance is ev...

This paper presents three types of wireless magnetoelastic resonant sensors with specific functionalities for monitoring sludge accumulation within biliary stents. The first design uses a geometry with a repeated cell shape that provides two well-separated resonant mode shapes and associated frequencies to permit spatial localization of mass loading. The second design implements a pattern with ...

This paper presents three types of wireless magnetoelastic resonant sensors with specific functionalities for monitoring sludge accumulation within biliary stents. The first design uses a geometry with a repeated cell shape that provides two well-separated resonant mode shapes and associated frequencies to permit spatial localization of mass loading. The second design implements a pattern with ...

Microelectromechanical systems (MEMS) resonant sensors provide a high degree of accuracy for measuring the physical properties of chemical and biological samples. These sensors enable the investigation of cellular mass and growth, though previous sensor designs have been limited to the study of homogeneous cell populations. Population heterogeneity, as is generally encountered in primary cultur...

Diesel engines, generating harmful NOx, will be subjected to legislation that stipulates large reductions in emission levels beginning in 2007. For controlling emissions, a NOx sensor is needed to provide feedback to the engine management system. In this work, we take advantage of the high mass sensitivity of resonant sensors and the chemical reaction of barium carbonate (BaCO3) with NO2 gas as...

Micro- and nanomechanical resonators are widely being used as mass sensors due to their unprecedented mass sensitivity. We present a simple closed-form expression which allows a fast and quantitative calculation of the position and mass of individual particles placed on a micro or nano string by measuring the resonant frequency shifts of the first two bending modes. The method has been tested b...

A novel technique is developed to cancel the effect of environmental parameters, e.g., temperature and humidity, in resonant mass sensing. Utilizing a single resonator, the environmental cancellation is achieved by monitoring a pair of resonant overtones and the effective sensed mass in those overtones. As an eminent advantage, especially compared to dual-mode temperature compensation technique...