The microsensor technology was used here to identify the initiation time of an impact shock. The shock excitation caused by an impact sphere with a diameter of 4-6 minimeters could generate transient elastic waves in concrete structures. Such elastic waves with frequency above 100 kHz are the active emission sources for defect detection in the non-destructive testing (NDT) of concrete using tra...

This paper presents design and characterization of a microaccelerometer designated for integration into cataract surgical probe to detect hardness of different eye tissues during cataract surgery. Soft posterior lens capsule of eye can be easily damaged in comparison with hard opaque lens since the surgeon can not see directly behind cutting needle during the surgery. Presence of microsensor he...

This paper presents a high-Q resonant pressure microsensor with through-glass electrical interconnections based on wafer-level MEMS vacuum packaging. An approach to maintaining high-vacuum conditions by integrating the MEMS fabrication process with getter material preparation is presented in this paper. In this device, the pressure under measurement causes a deflection of a pressure-sensitive s...

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A.L. Herrera-May, B.S. Soto-Cruz, F. López-Huerta, and L.A. Aguilera Cortés Centro de Investigación en Micro y Nanotecnologı́a, Universidad Veracruzana, Boca del Rı́o, Ver., México. Centro de Investigación en Dispositivos Semiconductores, Benemérita Universidad Autónoma de Puebla, Puebla, Pue., México. Facultad de Ciencias Fı́sico Matemáticas, Benemérita Universidad Autónoma de Puebla, Puebla, Pue...

A finite elements model of an interdigitated microsensor has been used to investigate the sensitivity of the sensor to the detection and the quantification of cells flowing in a test chamber. In particular the sensitivity of the sensor towards the geometry of sensors and the presence of a cell flowing through the channels was evaluated; several sensors topologies were considered in order to def...

We report fabrication and characterization of a new hydrogel-based microsensor for wireless chemical monitoring. The basic device structure is a high-sensitivity capacitive pressure sensor coupled to a stimuli-sensitive hydrogel that is confined between a stiff porous membrane and a thin glass diaphragm. As small molecules pass through the porous membrane, the hydrogel swells and deflects the d...

This paper focuses on reducing the power consumption of wireless microsensor networks. Therefore, a communication protocol named LEACH (Low-Energy Adaptive Clustering Hierarchy) is modified. We extend LEACH’s stochastic clusterhead selection algorithm by a deterministic component. Depending on the network configuration an increase of network lifetime by about 30 % can be accomplished. Furthermo...

This article introduces a power-efficient, miniature electronic nose (e-nose) system. The e-nose system primarily comprises two self-developed chips, a multiple-walled carbon nanotube (MWNT)-polymer based microsensor array, and a low-power signal-processing chip. The microsensor array was fabricated on a silicon wafer by using standard photolithography technology. The microsensor array comprise...