Porous silicon was successfully prepared using metal-assisted chemical etching method. The Effect of HF/H2O2 concentration in etching solution as an affecting parameter on the prepared porosity type and size was investigated. Field emission electron microscopy (FE-SEM) confirmed that all etched samples had porous structure and the sample which was immersed into HF/H2O2 withmolar ratio of 7/3.53...

We report a facile fabrication of porous silicon nanofibers by a simple three-stage procedure. Polymer/silicon precursor composite nanofibers are first fabricated by electrospinning, a water-based spinning dope, which undergoes subsequent heat treatment and then reduction using magnesium to be converted into porous silicon nanofibers. The porous silicon nanofibers are coated with a graphene by ...

The ease of fabricating high quality photonic crystals from porous silicon and its biocompatibility have inspired the conception of various biosensing schemes using this material. However, the instability of porous silicon has significantly slowed progress in this area. Here we discuss the potential of different porous silicon photonic crystals for biosensing in the context of its surface chemi...

The study of an innovative fluoropolymer masking layer for silicon anodization is proposed. Due to its high chemical resistance to hydrofluoric acid even under anodic bias, this thin film deposited by plasma has allowed the formation of deep porous silicon regions patterned on the silicon wafer. Unlike most of other masks, fluoropolymer removal after electrochemical etching is rapid and does no...

Porous silicon multilayers and microcavities, prepared by the pulsed electrochemical etching method, exhibit a variety of reflectivity and photoluminescence spectra. A comparison of the measured results with those calculated based on the transfer matrix method and quantum-box model reveals that the variation of the spectra can be attributed to the change in wavelength position of the stop-band ...

In this work, we present a novel fabrication process of lateral porous silicon membranes with tunable pore size and porosity for microfluidic applications. Our proposed method relies on the fact that the formation of porous silicon by anodization is highly dependent on the dopant concentration (Fig. 1) [1]. Here, we use ion implantation to manipulate the local dopant concentration in order to c...

This paper presents a method for the fabrication of integrated porous silica layers in microfluidic channel networks by microfabrication techniques. Porous silica is obtained by anodization of silicon, followed by full conversion of the porous silicon network into porous silica by means of thermal oxidation. A series of experiments were performed with various channel layouts to determine the cr...

In this work, we theoretically and experimentally demonstrate a highly sensitive porous silicon membrane waveguide biosensor in the Kretschmann configuration, and show how the cladding material directly impacts the waveguide sensor detection sensitivity and resonance width. Dielectric and metal-clad porous waveguides in the Kretchmann configuration have the potential to achieve significantly en...

Porous silicon is a suitable host material for biosensing applications due to its high surface area to volume ratio, which enables substantial infiltration of biomolecules. Resonant waveguides can be fabricated from porous silicon based on a two layer porous silicon structure. Light is coupled into the waveguide only at a particular angle of incidence. Biomolecular binding inside the pores indu...