A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.

Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.

This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The proposed sensor can detect three components of linear acceleration simultaneously. The sensing structure consists of combined cross-beam and surrounding beams and seismic mass. Therefore, this novel propos...

By applying the etching via technology, this study proposes a novel front-side etching fabrication process for a silicon-based piezoresistive pressure sensor to replace the conventional back-side bulk micro-machining. This novel structure pressure sensor can achieve the distinguishing features of the chip size reduction and fabrication costs degradation. In order to investigate the sensor perfo...

Epoxy containing 5.5 vol.% short carbon fibers was found to be piezoresistive strain sensor, such that the magnitude of the reversible fractional increase in electrical resistance per unit strain was 6-23 under tension and 29-31 under compression. These values are much higher than those of previously reporied composite piezoresistive materials. The reversible fractional increase in resistance w...

The radial artery pulse is one of the major diagnostic indices used clinically in both Eastern and Western medicine. One of the prominent methods for measuring the radial artery pulse is the piezoresistive sensor array. Independence among channels and an appropriate sensor arrangement are important for effectively assessing the spatial-temporal information of the pulse. This study developed a c...

A piezoresistive strain-gauge sensor, mounted in an array configuration, for the measurement of distributed pressures during robotic grasp applications is investigated. The prototype presented consists of a 16-element test cell connected to an electronic acquisition unit that also provides temperature compensation. The structure of the tactile sensor and its principle of operation are described.