This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) featuring 3D-printed legs in bridge resonators. The structures consisted aluminum-nitride (AlN) film top millimeter-sized rectangular thin silicon bridges two electrode patches. position size patches were analytically optimized for travelling or sta...

A piezoelectric ultrasonic resonant micro-motor is developed with a stator diameter of 241 μm and an overall diameter of 400 μm. The motor is shown to produce a start-up torque of 1.2 nN m and a peak output power of 0.25 μW as designed, with a preload of 46.6 μN. An increase in preload to 2264 μN improved the performance to a start-up torque of 29 nN m and a peak output power of 9.1 μW. The mot...

In this study, a novel automatic nano-alignment system using machine vision coupled with a piezoelectric motor for motion control was developed. The analytical algorithm of this visionaided auto-alignment design makes use of inputs of real-time movement captured by CCD to obtain the corresponding output feedback. Through matrix transformation, the algorithm establishes the characteristic matrix...

Nowadays, piezoelectric motors are used as amplifiers and receivers. The principle of operation stepper motors, which is the subject article, explains a small centrifugal inertial moving system. Piezoelectric measurement technology good tool that can be under conditions with some extreme dynamics, temperature geometry applications difficult to measure devices in our daily measurements. effect w...

In this paper, measurements of admittance magnitude and phase are used to identify the complex values of equivalent circuit model for free stator of an ultrasonic motor. The model is used to evaluate the changes in the admittance and relative changes in the values of equivalent circuit elements. This method identifies the damages and categorizes them. The validity of the method is verified by u...