This review surveys recent developments of DNA nanotechnology related to its applications in nanoelectronics industry. The authors start with a brief introduction nanostructures, followed by focused discussion various DNA-based fabrication approaches that are relevant the semiconductor industry, including doping materials, nanostructures metallic, dielectric, and lithographic patterning Si, SiO...

In the article technologies used in micro and nanoelectronics there are shortly described. Attention is devoted to lithography as a basic technology. Principles of electron and ion lithography are mentioned as well as progressive ion projection lithography. Some remarks to nanotubes as means of cold cathodes for vacuum electron tubes for nanoelectronics are presented.

Nanobioelectronics represents a rapidly developing field with broad-ranging opportunities in fundamental biological sciences, biotechnology, and medicine. Despite this potential, seamless integration of electronics has been difficult due to fundamental mismatches, including size and mechanical properties, between the elements of the electronic and living biological systems. In this Account, we ...