We propose a completely new concept [1,2] for a future lithography (see Fig. 1a) based on an array of single photon sources which has the potential to simultaneously decrease structure size and to greatly simplify nanostructure realization. Single photon sources can controllably produce a train of single photons with the appropriate energy needed for photochemical reactions in polymer systems c...

Flow lithography has become a powerful particle synthesis technique. Currently, flow lithography relies on the use of polydimethylsiloxane microchannels, because the process requires local inhibition of polymerization, near channel interfaces, via oxygen permeation. The dependence on polydimethylsiloxane devices greatly limits the range of precursor materials that can be processed in flow litho...

We present the fabrication and optical characterization of nano-scale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicron-scale cylinders fabricated by electron-beam lithography (EBL) are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates, i.e. glass, for optical characterization with visible ...

In the past several years, much progresses have been made in the area of scanning probe based, parallel soft nano lithography for patterning biomolecule directly with nano-meter resolution and high degree of registration accuracy. We report the development and demonstration of arrayed soft nanolithography probes for dip pen nanolithography (DPN), scanning probe contact printing (SPCP), and mult...

A novel approach to “direct-write” negative nano-lithography, based on biological specificity, where a proteolytic enzyme is used to etch grooves in a hardened protein layer. We are using trypsin to engrave features in a BSA layer, while flowing the trypsin solution via a nano-pipette (controlled by a SPM) to the surface. Trypsin is a proteolytic enzyme that cleaves very specifically on the car...