In this paper, the design of a novel ultrasensitive MEMS resonant force sensor utilizing a mode localization effect is presented. This new type of resonant sensor is constituted of several weakly coupled resonators and by measuring the amplitude ratio of designated resonators, a significant improvement in sensitivity is observed, compared to conventional frequency shift measurements. Furthermor...

In this research, the elastic behaviour of two Co thin films simultaneously deposited in an off-normal angle method was studied. Towards this end, two Si micro-cantilevers were simultaneously coated using pulsed laser deposition at an oblique angle, creating a Co nano-string surface morphology with a predetermined orientation. The selected position of each micro-cantilever during the coating pr...

The effect of a sacrificial layer residue on a cantilever beam in the nano-electro-mechanical nonvolatile memory is investigated for the optimization of reliability characteristics. Different from previous research, pull in voltage model of nano-electro-mechanical nonvolatile memory used triangular residue layer which is considered by real wet etching process. Modified pull in voltage model was...

This research quantitatively investigates fluid damping of MEMS and NEMS flexural resonators such as scanning probe and carbon nano-tube resonators, aiming to improve the quality factor prediction and therefore the resonator design. Fluid damping in beam-type resonators is most affected by resonant frequency, device dimensions and cross-sectional shape which are systematically examined within. ...

In this article, transverse vibration of a cantilever nano- beam with functionally graded materials and carrying a concentrated mass at the free end is studied. Material properties of FG beam are supposed to vary through thickness direction of the constituents according to power-law distribution (P-FGM). The small scale effect is taken into consideration based on nonlocal elasticity theory of E...

The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good platform due to its excellent mechanical properties. A cantilever working in dynamic mode, adjust its resonance frequency depending on changes in both, the spr...

Owning to their unparalleled sensitivity resolution, nanomechanical resonators have excellent capabilities in design of nano-sensors for gas detection. The current challenge is to develop newdesigns of the resonators for differentiating distinct gas atoms with a recognizably high sensitivity. In this work, the characteristics of impulse wave propagation in carbon nanotube-based sensors are inve...

In this article thermoelastic damping in nano-beam resonators is investigated based on nonlocal theory of elasticity and the Euler-Bernoulli beam assumptions. The governing equation of deflection of the beam is obtained from shear and moment resultants and stress–strain relationship of the nonlocal elasticity model and also the governing equations of thermoelastic damping are established by usi...