Abstract Flexoelectricity is a universal electro-mechanical coupling effect that occurs in dielectrics of all symmetric groups and becomes dominant at the micro- nano-scales. It plays an important role evaluating micro-electro-mechanical systems (MEMS) such as energy harvesters which convert vibrational to electric energy. At finer length scales, micro-inertia effects significantly contribute b...

This paper presents the advantages of a strong coupled formulation to model the electro-mechanical coupling appearing in MEMS. The classical modeling approach is to use a staggered methodology iterating between two different programs to obtain the solution of the coupled problem. In this research a strong coupled formulation is proposed and a tangent stiffness matrix of the whole problem is com...

The size of every component for opto-electrical devices or micro electro-mechanical systems (MEMS) has been reduced in recent years due to progress in opto-digital communications technology. The demands for micro-sized holes, slits and 3D structures of hard brittle materials such as ceramics and glass are considerable, and this has stimulated research into new methods and systems for a micro-me...

We study the existence and stability of periodic solutions of a canonical mass-spring model of electrostatically actuated micro-electro-mechanical system (MEMS) by means of classical topological techniques like a-priori bounds, Leray-Schauder degree and topological index. A saddle-node bifurcation is revealed, in analogy with the autonomous case.

This paper presents a hybrid prognostics approach for Micro Electro Mechanical Systems (MEMS). This approach relies on two phases: an offline phase for the MEMS and its degradation modeling, and an online phase where the obtained degradation model is used with the available data for prognostics. In the online phase, the particle filter algorithm is used to perform online parameters estimation o...

We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scann...

The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.

The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to...

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...