There are significant efforts to develop gyroscopes using MEMS technology; accuracies of gyroscopes varying from rate-grade, through tactical-grade, to inertial grade. The random walk varies from 0.5 o /√h through 0.05 o /√h to 0.001 o /√h. The most common approach is to use vibratory gyros, which use mechanical elements (proof-mass) to sense the rotation. There are several types of vibratory g...

This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS) device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase difference between two sound waves traveling in opposite directions, and correlates the signal to the a...

in this paper, an adaptive neuro fuzzy inference system (anfis) based control is proposed for the tracking of a micro-electro mechanical systems (mems) gyroscope sensor. the anfis is used to train parameters of the controller for tracking a desired trajectory. numerical simulations for a mems gyroscope are looked into to check the effectiveness of the anfis control scheme. it proves that the sy...

This application note gives an overview of different control mechanisms for MEMS Coriolis Vibratory Gyroscopes (CVG) and how they are implemented using the commercial off-the-shelf HF2LI Lock-in Amplifier. A MEMS gyroscope is a micro-machined inertial device that can measure the angle of orientation or the angular rate of rotation. The principle relies on a vibrating structure that is suspended...

Parametric excitation in vibratory systems is known well over hundred years. Recently it also being exploited Micro-electromechanical Systems (MEMS). One example of these are micro-ring gyroscopes, which used the automotive, navigation and space industries. The sensitivity such gyroscopes can be impaired by signal noise induced through parasitic capacitance between drive sense electrodes. Apply...

In this contribution, a systematic method for the design of openand closedloop controllers for vibratory MEMS gyroscopes based on so-called envelope models will be presented. The methodology will be exemplarily carried out for a gyroscope with electrostatic actuation and read-out elements. The specifically designed capacitive actuators of the gyroscope are capable of compensating the system’s i...

Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement band...

In this paper, an Adaptive Neuro Fuzzy Inference System (ANFIS) based control is proposed for the tracking of a Micro-Electro Mechanical Systems (MEMS) gyroscope sensor. The ANFIS is used to train parameters of the controller for tracking a desired trajectory. Numerical simulations for a MEMS gyroscope are looked into to check the effectiveness of the ANFIS control scheme. It proves that the sy...