Microphone arrays of various sizes and shapes are currently employed in consumer electronics devices such as speakerphones, smart TVs, smartphones, headphones. In this paper, a full-digital, planar microphone array is presented. It makes use digital Micro Electro-Mechanical Systems (MEMS) microphones, connected through the Automotive Audio Bus (A <sup xmlns:mml="http://www.w3.org/1998/Math/Math...

This article deals with effects of thermal stresses on stability and frequency response of a fully clamped circular microplate, which acts as the diaphragm of a capacitive MEMS microphone. Static and dynamic pull-in phenomena limit the stable regions of a capacitive MEMS microphone. The results show that the non-dimensional static pull-in voltage of the studied case is about 5.23 (38.6 V). On t...

Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET) transduction based on an electret and FET (field-effect-transistor) as a novel mechanism of MEMS microphone transduction. The ElGoF...

This paper describes a novel three-dimensional sound intensity probe consisting of 8 MEMS (micro-electromechanical systems) microphones and a novel free-field calibration method. The use of MEMS-microphones allows for a very compact design compared to probes that employ 1/2-inch condenser microphones. A novel free-field calibration method, based on the principle of microphone interchange, is de...

This paper introduces passive wireless telemetry based operation for high frequency acoustic sensors. The focus is on the development, fabrication, and evaluation of wireless, battery-less SAW-IDT MEMS microphones for biomedical applications. Due to the absence of batteries, the developed sensors are small and as a result of the batch manufacturing strategy are inexpensive which enables their u...

Abstract This paper presents a switched-bias MEMS microphone preamplifier for an ultra-low-power voice interface. A switched-MOSFET periodically changes the MOSFET between strong inversion and accumulation to inherently reduce 1/f noise. In addition, a proposed coupling capacitor allows the microphone to benefit from a high bias voltage while the preamp can use a low VDD. The preamp achieves 7 ...

This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, ...