To address the bottleneck issues of an elastic-style six-axis force/torque sensor (six-axis force sensor), this work proposes a no-elastic piezoelectric six-axis force sensor. The operating principle of the piezoelectric six-axis force sensor is analyzed, and a structural model is constructed. The static-active design theory of the piezoelectric six-axis force sensor is established, including a...

It is necessary to detect complex force and torque components of three-dimensional space in research and manufacture, therefore the multi-axis force and torque sensors are developed rapidly. For examples, the six-axis wrist force/torque sensor for robot assembling and automated polishing [1,2], the multi-component strain gauge balance for wind tunnel testing to determine loads on models [3], th...

Developing nanomechanical oscillators for ultrasensitive force detection is very useful in exploring science. We report our achievement of the external regarding radiofrequency electric field by a nanosensor made single trapped ${}^{40}{\mathrm{Ca}}^{+}$ ion under injection locking, where squeezing additionally applied to smallest trap. The employed confined stably surface electrode trap and wo...

This paper presents the design and fabrication of a multi-axis microelectromechanical system (MEMS) force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors. Through the use of proper CNT selection and sensor fabrication techniques, the performance of the CNT-based MEMS force sensor was increased by approximately two orders of magnitude as compared to current CNT-based se...