Defect analysis using a Scanning Electron Microscope (SEM), commonly known as Electron Channeling Contrast Imaging (ECCI), has received much attention in the recent past. Traditional defect analysis has for decades relied on Transmission Electron Microscopy (TEM) modalities, such as the bright field-dark field and weak beam imaging, and Scanning Transmission Electron Microcopy (STEM) diffractio...

Electron backscatter diffraction EBSD is a powerful technique applicable to a range of microstructural analyses, including texture, grain size, boundary characterization, phase distribution and inter-phase orientation relationships. The technique is suited to solving an increasing range of analytical problems on the um to mm scale. However, best results are only obtained with a good understandi...

The microstructure evolution of electroplated copper films was characterized by electron backscatter diffraction (EBSD). Special care was taken during the preparation of the cross-sectional specimens and microstructure analysis to obtain reliable results. The film exhibited a columnar grain structure with a large fraction of twin boundaries. Annealing induced normal grain growth and caused many...

X-ray diffraction (XRD) and electron backscatter diffraction (EBSD) are commonly used to perform texture analysis of thin films. However, due to principle differences in data acquisition these techniques can yield disagreeing results. In this paper, we aim to highlight possible error sources with given examples for aluminum and copper thin films. INTRODUCTION Texture in materials has a large in...

Electron backscatter diffraction (EBSD) originated in materials science and has transferred to biomineral research providing insight into fossil and modern biominerals. An electron microscopy technique, EBSD requires a fine polished sample surface where the electron beam diffracts in the first few lattice layers, identifying mineral, polymorph and crystallographic orientation. The technique is ...

The present study investigates the crystal preferred orientation (CPO) of quartz crystals in psammitic rocks to ascertain the deformationmechanism using electron backscatter diffraction (EBSD) on quartz crystals from north of the Renvyle-Bofin Slide (RBS) nearLetterfrack in western Ireland. Complete crystallographic orientations were determined for several thousand individual quartz crystalsin ...

The twin distribution in topological insulators Bi2Te3 and Bi2Se3 was imaged by electron backscatter diffraction (EBSD) and scanning X-ray diffraction microscopy (SXRM). The crystal orientation at the surface, determined by EBSD, is correlated with the surface topography, which shows triangular pyramidal features with edges oriented in two different orientations rotated in the surface plane by ...