The application of Micro Electro Mechnical Switch (MEMS) technology to Electronically Scanned Arrays (ESAs) provides the potential for significantly reducing the volume, weight, cost, and power consumption of antennas for both radar and communications systems. This paper addresses the current and projected status of Radio Frequency (RF) MEMS technology and assesses the potential benefits of MEM...

A micro-electro-mechanical system (MEMS) is a technology that allows obtaining components between 1 to 1000 micrometers (usually 20 micrometers). Its small dimension and, at the same time, the low power consumption, has become the most important features so as to develop a new technology for nano-scale components. Moreover, the fabrication procedures are as simple as a Microstrip line procedure...

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)

The aim of this work is to develop a lowoverhead, low-cost built-in test for Micro Electro Mechanical Systems (MEMS). The proposed method relies on processing the Impulse Response (IR) through trained neural networks, in order to predict a set of MEMS performances, which are otherwise very expensive to measure using the conventional test approach. The use of neural networks allows us to employ ...

In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...

In this paper we develop a numerical procedure using finite element and augmented Lagrangian meth-ods that simulates electro-mechanical pull-in states of both cantilever and fixed beams in microelectromechanical systems (MEMS) switches. We devise the augmented Lagrangian methods for the well-known Euler-Bernoulli beam equation which also takes into consideration of the fringing effect of electr...

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)

Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to t...

In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...

In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called “U-shape cantilever beam,” we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the d...