This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope tructure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low echanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The ...

This paper presents a Gaussian radial basis function neural network based on sliding mode control for trajectory tracking and vibration control of a flexible joint manipulator. To study the effectiveness of the controllers, designed controller is developed for tip angular position control of a flexible joint manipulator. The adaptation laws of designed controller are obtained based on sliding m...

With the rapid development of modern physics, atomic gyroscopes have been demonstrated in recent years. There are two types of atomic gyroscope. The Atomic Interferometer Gyroscope (AIG), which utilizes the atomic interferometer to sense rotation, is an ultra-high precision gyroscope; and the Atomic Spin Gyroscope (ASG), which utilizes atomic spin to sense rotation, features high precision, com...

This paper represents a MEMS based gyroscope to measure orientation. Silicon-micro-machined gyro is fabricated on the basis of resonators and they use vibrating mechanical element to sense rotation. The vibratory measurement can be done by measuring the change in capacitance with respect to the voltage or force applied in particular axis. Here MEMS based gyroscope has been designed from Lame mo...

In this paper, absolute positioning instrument using trilateration ultrasonic sensor is mainly proposed to estimate absolute position errors combined with estimated position and orientation from differential odometry integrated with gyroscope to calculate absolute position of mobile robot. In the method, the indirect Kalman filter is mainly used to estimate absolute position errors and the esti...

In this paper, a digital rebalance loop for MEMS gyroscope is designed and its performance test is performed. First, the system model of MEMS gyroscope is established by dynamic analysis. Then, the digital rebalance loop is designed using modern control technique. The performance of the digital rebalance loop is compared with that of conventional PID rebalance loop. Through frequency response a...

This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, the driving and sensing parts of the gyroscope were designed to oscillate in-plane. Furthermore, by removing the substrate underneath the device, th...

An electro-conjugate fluid (ECF) is a kind of dielectric fluid that works as a functional/smart fluid generating a powerful jet flow (ECF jet) when subjected to a high d.c. voltage. The authors previously proposed the first liquid rate gyroscope in the world using ECF. The ECF liquid rate gyroscope proposed uses the drift of the ECF jet due to the Coriolis force when an angular motion is applie...

This paper presents a variable structure rule-based fuzzy control for trajectory tracking and vibration control of a flexible joint manipulator by using chaotic anti-control. Based on Lyapunov stability theory for variable structure control and fuzzy rules, the nonlinear controller and some generic sufficient conditions for global asymptotic control are attained. The fuzzy rules are directly co...

The central element of the Stanford relativity experiment is a cryogenic gyroscope with a performance in space many orders of magnitude superior to that of conventional earth-boiind devices. In the early pllases of the program, a great deal of thought wa? given t o the problem of achieving the performance goal, and an entirely new gyro concept was developed by William Fairbank and Francis Everi...