In the world of MEMS processing today, fabrications of membrane are performed using bulk micromachining (BMM). However these techniques not easiest to integrate with CMOS standard process due to not compatible of the processing flow. An attractive alternative deployment of surface micromachining (SMM). There is a trend to use surface micromachining to their advantage of simplicity in design and...

A highly innovative miniature silicon comb to sense differential microphone diaphragm has been developed that is highly stable when subjected to various bias voltages [1]. The bio-inspired microphone diaphragm consists of a 1 mm by 2 mm stiffener-reinforced plate fabricated out of phosphorous-doped polysilicon that is supported on a central hinge [2,3,4]. Interdigitated comb fingers are formed ...

A cusp gun, designed to generate an axis encircling beam with low velocity spread for high harmonic, high power (70 kV, 3.5 A) operation in gyrotrons and peniotrons, has been successfully fabricated and hot tested at reduced voltage, in a beam tester designed to measure beam perveance, size, thickness, velocity ratio (beam alpha), and later, beam ripple and velocity spread. The correct beam per...

electrochemical properties of various rock-shaped-cuo/graphite (g) composites and monoclinic structure cuo nanoparticles as the cathode versus a zinc plate as the anode in a 4m naoh electrolyte were elucidated by electrochemical impedance spectroscopy (eis) and chronopotentiometry (cp) in a two electrode configuration cell. various values of g 9, 16 and 28 wt% were prepared and studied as catho...

Mechanical stoppers in MEMS capacitive systems can dramatically affect electrical performances and result complicated mechanical dynamic responses. This paper introduces electromechanical coupling nonlinear responses variable dual-capacitor with an effect of asymmetrical stoppers. We found that the capacitance circuit system related to first-order derivative output voltage on a load resistor, w...

In this paper two MEMS capacitive pressure sensor of two diffident geometries are designed for measurement of absolute pressure. Both of these sensors are designed as parallel plates where one is movable and the other is fixed. The only difference with common parallel plate structure is that one of the movable plates is supported by four anchors with respect to the fixed plate. Here we have con...

This article presents the design, manufacture and testing of a capacitive pressure sensor with a high, tunable performance to low compressive loads (<10 kPa) and a resolution of less than 0.5 kPa. Such a performance is required for the monitoring of treatment efficacy delivered by compression garments to treat or prevent medical conditions such as deep vein thrombosis, leg ulcers, varicose vein...