It is well established that pad conditioning facilitates polish rate stability in chemicalmechanical polishing (CMP) of interlayer dielectic (ILD) silicon dioxide films and that in the absence of conditioning, polish rates decay over time [Stein et al., Lawing]. ILD rate decay is also associated with changes in pad surface morphology [Lawing, Kojima et al.]. In [Lawing], it was found that the p...

Adhesive wear occurs by the transfer of material from one surface to another when two surfaces articulate against each other under load. The transferred material could break off and act as third-body particles resulting in abrasive wear. Abrasive wear occurs when material is removed from a surface by hard asperities on the counterface and hard particles (third body) trapped between the two cont...

The mathematical model was compiled for the studies of the dynamics of an abrasive processing in a magnetic field. An analytical solution of its nonlinear part was found synthesizing harmonic balance method and computer algebra technique. Solutions of the linear part were obtained by the traditional numerical techniques. The numeric investigation of process dynamic features was fulfilled, regim...

As a new manufacturing process, abrasive water jet (AWJ)cutting has been very effective for difficult-to-machine materials. From the point of view of jet generation, abrasive water jets can be categorized as injection jeti or suspension jets. Injection jets are the most commonly used type for practical applications. An injection AWJ is formed by accelerating small abrasive particles through con...

This study concerns the determination of the significant factors for an innovative deburring process: low pressure abrasive water-jet blasting. We firstly classify the abrasive medium aluminum oxide (Al2O3) according to the individual characteristics of different grain sizes. Then, the particle behavior in the air jet is analyzed with an optical measuring method, Particle Image Velocimetry (PIV...

Magnetic abrasive finishing (MAF) is a micromachining process that uses magnetic field and magnetic abrasive particles to conduct the mechanism of material removal in micro-nanometer scales. In this paper, by an experimental method and statistical analysis, the effects of parameters like working gap, work-piece rotational speed and material removal mechanism (injection of abrasive slurry of Al<...

The already initiated studies are based on size and forms of abrasive grains, but few studies have addressed the influence on the concentration of abrasive grains. This research has been done to remove some of the mysteries associated in the media "abrasives" or "chips" used in vibratory and barrel finishing, this process included within the functions and characte...

Magnetic abrasive finishing (MAF) is a micromachining process that uses magnetic field and magnetic abrasive particles to conduct the mechanism of material removal in micro-nanometer scales. In this paper, by an experimental method and statistical analysis, the effects of parameters like working gap, work-piece rotational speed and material removal mechanism (injection of abrasive slurry of Al<...

This paper develops analytically a statistical model for predicting the material removal in mechanical polishing of material surfaces (MS). The model was based on the statistical theory and the abrasive–MS contact mechanisms. The pad-MS and pad-abrasive-MS interactions in polishing were characterised by contact mechanics. Two types of active abrasive particles in the polishing system were consi...