The ion-sensitive field effect transistor (ISFET) of chemical sensors has been used due to many reasons which have the advantages of small size, light weight and fast response by semiconductor processing. In recently, the sensing membranes applied to high-k materials such as Al2O3, ZrO2, HfO2, TiO2 and Ta2O5 for pH-ISFET were investigated because of the high sensitivity [1]. The Al2O3 film amon...

The effect of -Al2O3 particles on the electrochemical codeposition behaviour of Co–Ni alloys from sulfamate electrolyte was investigated by codeposition experiments, zeta potential and electrochemical methods. The results indicate that the presence of Al2O3 particles in Co–Ni sulfamate electrolytes contributes to the preferential codeposition of Co. Moreover, increasing Co2+ concentration also ...

We report the characterization of aluminum oxide (Al2O3) films which are grown on Si substrates by electron beam evaporator. This paper focuses on the characteristic variation of Al2O3 films depending on the different annealing techniques, such as post-deposition annealing and post-metallization annealing. The capacitance-voltage (C-V) curves indicate a negative charge and interface trap charge...

A series of ceria nanocatalysts have been prepared to study the structure dependency of the CO oxidation reaction. The ceria samples with well-defined nanostructures (nanocubes/Ce-NC and nanorods/Ce-NR) have been prepared using the hydrothermal method. Mesoporous ceria (Ce-MES) and ceria synthesized with solution combustion technique (Ce-SCS) have also been prepared for comparison. The lowest C...

The East Asian summer monsoon controls the climatic regime of an extended region through temperature and precipitation changes. As the East Asian summer monsoon is primarily driven by the northern hemisphere summer insolation, such meteorological variables are expected to significantly change on the orbital timescale, influencing the composition of terrestrial sediments in terms of both mineral...

The production of clean steel involves the controlling, elimination, or modification of nonmetallic inclusions. In Al-killed steels, alumina is the main type of inclusion. Calcium treatment, by wire feeding, is commonly used to modify solid alumina inclusions to calcium aluminates, which exists in a fully or partially liquid phase. Liquid inclusions can improve steel castability, but make inclu...

The thermal atomic layer etching (ALE) of Al2O3 can be performed using sequential and self-limiting reactions with trimethylaluminum (TMA) and hydrogen fluoride (HF) as the reactants. The atomic layer deposition (ALD) of AlF3 can also be accomplished using the same reactants. This paper examined the competition between Al2O3 ALE and AlF3 ALD using in situ Fourier transform infrared (FTIR) vibra...

Electrical properties, current transport mechanism, and stress induced leakage current (SILC) effect of Al2O3 gate dielectric thin films deposited by reactive dc magnetron sputtering were studied. The results show that annealing in O2 ambient can effectively reduce the oxygen vacancy in Al2O3 films but may not result in additional interfacial layer form at Al2O3/Si interface. In the fresh devic...

In this study, the phase transition characteristics of flame-synthesized γ-Al2O3 nanoparticles to α-Al2O3 have been investigated. The nanoparticles were synthesized by using a coflow hydrogen diffusion flame. The phase transition and particle characteristics of the Al2O3 nanoparticles were determined by examining the crystalline structure and the shape of the collected nanoparticles before and ...

The aluminum oxide (Al2O3) thin films with various thicknesses under 50 nm were deposited by atomic layer deposition (ALD) on silicon substrate. The surface topography investigated by atomic force microscopy (AFM) revealed that the samples were smooth and crack-free. The ellipsometric spectra of Al2O3 thin films were measured and analyzed before and after annealing in nitrogen condition in the ...