Atomic shadowing during kinetically limited physical vapor deposition causes a chaotic instability in the layer morphology that leads to nanorod growth. Glancing angle deposition GLAD experiments indicate that the rod morphology, in turn, exhibits a chaotic instability with increasing surface diffusion. The measured rod width versus growth temperature converges onto a single curve for all metal...

Structural chirality has been imposed onto nano-alloys to introduce diverse new properties. Chiral nanoparticles (CNPs) with the atomic scale are composed of metastable chiral lattices having low thermal stability, so multielementary (>2 elements) CNPs very challenging produce using traditional high-energy fabrication methods. Herein, layer-by-layer glancing angle deposition (LbL-GLAD) at a sub...

For the first time, grazing incidence small-angle X-ray scattering (GISAXS) analysis is used to characterize the morphology of TiO(2) thin films grown by glancing angle physical vapor deposition (GLAD). According to cross-section scanning electron microscopy (SEM) images, the films consist of near isotilted TiO(2) columns of different length and width depending on film thickness. The obtained G...

Titanium thin films were deposited by dc magnetron sputtering. The GLancing Angle Deposition (GLAD) method was implemented to prepare two series of titanium films: perpendicular and oriented columnar structures. The first one was obtained with a conventional incidence angle of the sputtered particles ( = 0°), whereas the second one used a grazing incidence angle = 85°. Afterwards, films were an...

Abstract Gadolinium oxide nanorod (Gd 2 O 3 NR) was fabricated on an n-type silicon substrate by catalyst-free glancing angle deposition (GLAD) technique. The as-grown sample annealed at 500 °C to investigate the impact of annealing structure and optical properties. XRD analysis reveals improvement in crystal after annealing. Field emission scanning electron microscope (FE-SEM) energy dispersiv...

Three-dimensional Cu-Si and Cu-SiO(2) nanorod arrays containing ~68 at% Cu have been fabricated by a glancing angle co-deposition technique. By selectively etching Cu in 0.05 M KCN methanol solution, porous nanorods with different shapes form, which are promising for applications in sensors, catalysts, and as medical capsules that are able to be loaded with functional materials.

Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continu...

Surface-enhanced Raman spectroscopy (SERS) has developed as a feasible method for chemical and biological applications, unifying the precision of molecular fingerprinting with potential sensitivity single molecules. SERS shown promise detection tool, but like all other methods, it some limitations. These include brittle fragile substrates, poor adhesion thin film to limited reusability inhomoge...

This paper presents an enhanced seeding rule for the design and fabrication of line seeds glancing angle deposition (GLAD). GLAD is capable creating nanometer-level three-dimensional (3D) features by ballistic shadowing from natural/artificial nuclei at oblique incident angles in physical vapor processes. The features, including columns, springs, zigzags, ribbons, are building blocks a wide ran...