Structuring Si in arrays of vertical high aspect ratio pillars, ranging from nanoscale to macroscale feature dimensions, is essential for producing functional interfaces many applications. Arrays silicon 3D nanostructures are needed realize photonic and phononic crystals, waveguides, metalenses, X-ray wavefront sensors, detectors. In particular, nanopillars used as bio-interfaces neural activit...

School of Astronautics Department of Astronautics Engineering and Mechanics Bachelor of Engineering Non-smooth Approach for Contact Dynamics and Impulse-based Control of Frictional Furuta Pendulum by Hantian Zhang In this thesis, a non-penetrated and physically consistent non-smooth numerical approach has been proposed, by employing the Prox formulation and Moreau’s mid-point time-stepping rule...

The thermodynamic model of ultrathin lubricant lm melting conned between two atomically-at solid surfaces is built using the Landau phase transition approach. Non-equilibrium entropy is introduced describing the part of thermal motion conditioned by non-equilibrium and non-homogeneous character of the thermal distribution. The equilibrium entropy is changed during time due to transition of non-...

We have demonstrated a family of large force and large displacement electrostatic linear inchworm motors that operate with moderate to high voltages. The inchworm motor design decouples actuator force from total travel and allows the use of electrostatic gap-closing actuators to achieve large force and large displacement while consuming low power. A typical inchworm motor measures 3 mm 1 mm 50 ...

Polysilicon MEMS structures are coated with self-assembled monolayers (SAMs) to reduce stiction and improve wear resistance. This study reports on an octadecyltrichlorosilane (OTS) coated low pressure chemical vapour deposited (LPCVD) polysilicon based MEMS test structure fabricated at Sandia National Laboratories, USA. The surface morphology and OTS layer have been studied by SEM, XPS and AFM....

Nano-electro-mechanical(NEM) relay technology has been proposed efficiently for ultra-lowpower digital integrated circuit applications [1], [2]. This is because the relay is an ideal switch, and that it exhibits abrupt on/off switching behavior and zero offstate leakage current (IOFF), so that its operating voltage (VDD) can be reduced to be close to zero, in principle. Hence, NEM relay technol...