نتایج جستجو برای: silicon film

تعداد نتایج: 166952  

2002
Kenji YAMAMOTO

A photoelectric conversion efficiency of over 10% has been achieved in thin-film polycrystalline silicon solar cells which consists of a 2 μm thick layer of polycrystalline silicon with a very small grain size (microcrystalline silicon) formed by low-temperature plasma CVD. This has shown that if the recombination velocity at grain boundaries can be made very small, then it is not necessarily i...

2011
Marco Ficcadenti Nicola Pinto Lorenzo Morresi Gérald Ferblantier Marzia Carrada Abdelillah Slaoui

We investigated the morphological and structural change in silicon nanostructures embedded in the silicon oxynitride matrix. The study has been carried out on thin films thermally annealed at high temperature, after deposition at 400°C by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapour Deposition (ECR‐ PECVD), under different deposition parameters. Our stud...

2000
A. Avila I. Montero J. M. Ripalda

Thin silicon carbide films have been deposited by chemical vapor deposition on p-type ~100! silicon substrates. The composition and bonds formed in these films have been analyzed by x-ray photoelectron spectroscopy ~XPS! and infrared spectroscopy. The native surface oxide on the silicon carbide surface induced by air exposure has also been studied. Several phases are detected in the near-surfac...

2003
J. Kuendig M. Goetz A. Shah L. Gerlach E. Fernandez

The paper reports on the effects of a proton irradiation campaign on a series of thin-film silicon solar cells (singleand double-junction). The effect of subsequent thermal annealing on solar cells degraded by proton irradiation is investigated. A low-temperature annealing behaviour can be observed (at temperatures around 100 to 160 C) for microcrystalline silicon solar cells. To further explor...

Hasan Nedaie Majid Shariari Zahra Anjomani,

Introduction: Nowadays new radiochromic films have an essential role in radiotherapy dosimetry. Properties such as high sensitivity, good reproducibility, high spatial resolution, easy readout and portability have made them attractive for dosimetry, especially in high-dose-gradient regions. Material and Methods: In this study, electron-beam dose distributions in homogenous and heterogeneous pha...

2001
C. R. Stoldt M. C. Fritz C. Carraro R. Maboudian

1,3-Disilabutane is used as a single-source precursor to deposit conformal silicon-carbide films on silicon atomic-force-microscopy cantilevers. By measuring the resonance frequency of the cantilever as a function of silicon-carbide film thickness and developing an appropriate model, the value of the film’s elastic modulus is determined. This value is in good agreement with those reported for s...

2002
JACEK GOŁĘBIOWSKI

Magnetic microactuation systems of torsion silicon cantilever is described. Devices are constructed in a batch fabrication process which combines electroplating with conventional photolithography , materials, and equipment. The magnetic transducers are applied to generation of motion in micromechanical structures such as cantilever, beam, membrane. Microelectromechanical systems (MEMS) with mag...

Journal: :Nanotechnology 2010
T Hopf J Leveneur A Markwitz

We have developed a novel technique based on the selective desorption of an oxide film in order to grow ordered arrays of silicon carbide nanocrystals on a silicon surface. These nanocrystals form as a byproduct of void nucleation in the oxide during the high-temperature vacuum annealing of silicon, a process which normally produces a random distribution of nanocrystals across the silicon surfa...

1999
N. R. Rueger G. S. Oehrlein

Selective etching of SiO2 over polycrystalline silicon has been studied using CHF3 in an inductively coupled plasma reactor ~ICP!. Inductive powers between 200 and 1400 W, as well as pressures of 6, 10, and 20 mTorr were used in this study of the etch rate and selectivity behaviors for silicon dioxide, silicon, and passively deposited fluorocarbon films. Using in situ ellipsometry, the etch rat...

Mahsa Tabari, Mohadeseh Famil Zirak

Objective(s): Application of eco-friendly materials like poly lactic acid (PLA) is increasing, to reduce environmental pollutions. In this research, the effect of silicon dioxide 1%, 3% and 5% nanoparticles on morphological, mechanical and chemicals interaction (FTIR) of PLA film was studied. Materials and Methods: Scanning electron microscope (SEM) was used, ...

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