In the present report, generation of Tantalum oxyfluoride and oxynitride upon ammonolysis gel obtained from modified tantalum-alkoxo complexes is reported. To best our knowledge, this first report formation tantalum thin films via β-diketone complex [Ta(OEt)4(CF3COCH2COCH3)]m. The integration nitrogen fluorine in lattice sites metal oxides leads to significant reduction bandgap, resulting their...
