The superinductor, the lumped-element LC resonator, and the microstrip feedline line were fabricated within the same vacuum cycle using multi-angle electron-beam deposition of Al films through a nanoscale lift-off mask. To minimize the spread of the junction parameters, we have used the so-called“Manhattan-pattern”bi-layer liftoff mask formed by a 400-nm-thick e-beam resist (the top layer) and ...
