This paper describes a method to measure and compensate a 4 axes ultra-precision machine tool that generates micro patterns on the large surfaces. The grooving machine is usually used for making a micro mold for many electrical parts such as a light guide plate for LCD and fuel cells. The ultra precision machine tool has three linear axes and one rotational table. Shaping is usually used to gen...

The mechanical design of ultra-precision machine tools and respectively the mechanical behavior of precision axes are very well understood today. Detailed investigations on precision axes behavior, dimensioning of bearings and drives and overall machine concepts have built a broad basis for designing very stiff and accurate state of the art machine tools. Enhancements to further increase the ac...