Neutral atomic and molecular species, generated upon the interaction of UV excimer laser light with Al-alkyl/substrate interfaces, are detected by single-shot dye laser mass spectroscopy. The molecules studied at 308, 248, and 193 nm are trimethylaluminum (TMA), triethylaluminum (TEA), and triisobutylaluminum (TIBA). The substrate is either n-type Si( 100) or Si02 (quartz). The major aluminum-c...