We have experimentally demonstrated a compact, integrated optical hydrogen sensor on a silicon-on-insulator platform. The sensor consists of silicon waveguide coated with a thin palladium film. The sensitivity and response time of the sensor was tested for volumetric hydrogen concentrations ranging from 0% to 4%. The proposed hydrogen sensor shows great potential as a building block for an opti...

The LHCb Vertex Locator contains 42 silicon sensor modules. Each module has two silicon sensors. A method for determining the relative alignment of the silicon sensors within each module from data is presented. The software implementation details are discussed. Monte-Carlo simulation studies are described that demonstrate an alignment precision of 1.3 μm is obtained in the sensor plane. LHCb Pu...

We present a dextran modified silicon microring resonator sensor for high density antibody immobilization. An array of sensors consisting of three sensor rings and a reference ring was fabricated and its surface sensitivity and the limit of detection were obtained using polyelectrolyte multilayers. The mass sensitivity and the limit of detection of the fabricated sensor ring are 0.35 nm/ng mm a...

We present an numerical investigation of a planar waveguide surface plasmon resonance (SPR) sensor in silicon-oninsulator (SOI) for detecting a change in the imaginary part of the refractive index. By adding a thin adsorbed layer between the metal-analyte boundary it is found that an enhanced sensitivity of the sensor is obtained, suggesting the possibility of realizing a highly integrated and ...

In this paper we present a framework for the design of experiments for sensor calibration. The theoretical ideas, which are based on the mathematical theory of optimal design of experiments, are demonstrated using a new software program, I-OPT, which was developed by Crary, Snow, and Hoo.' This program has been used to find I-optimal designs for both a silicon capacitive absolute-pressure senso...

The vibration analysis is an important step in the design and optimization of microsensors. In most of the cases, COMSOL software is employed to consider the size-dependency on the dynamic behavior in the MEMS sensors. In this paper, the Modified Couple Stress Theory (MCST) is used to capture the size effect on dynamic behavior in a microsensor with two layers of the silicon and piezoelectric. ...

There are a many of needs for the development of SiC-based hydrogen sensor for harsh environment applications. We fabricated and investigated Pd/Ta2O5/SiC-based hydrogen sensors with MOS capacitor structure for high temperature process monitoring and leak detection applications in such automotive, chemical and petroleum industries as well as direct monitoring of combustion processes. In this wo...

This project maps the distributed feedback loops of biological photoreceptors to silicon to create low-power high-performance silicon photoreceptors. Such photoreceptors are useful as front ends in VLSI motion sensors, important in robotic and active-vision applications. An ultra-low-noise MEMS vibration sensor, which provides inertial information to a vibrating visual sensor being built by col...

A precise and simple in-situ voltammetric measurement of promethazine, based on the nano sized molecularly imprinted polymer (nano-MIP) was introduced. The nano-MIP was synthesized utilizing vinyl benzene and Divinylbenzene as the functional monomer and cross-linker respectively, and via the micro-emulsion polymerization method in silicon oil. The MIP particles were then embedded in a carbon pa...

In this paper, a high sensitive, stable and reproducible electrical chemical sensor system based on macroporous silicon has been developed. Screen printed metal contacts have been taken from macroporous silicon layer which result in extremely stable, quasi ohmic and reproducible contacts. Such a sensor structure has been characterized for different organic and ionic solutions commonly used for ...