Continuously shrinking device parameters and the enlargement of wafer diameters in semiconductor industry require best temperature homogeneity in Rapid Thermal Processing (RTP). This together with the requirement of high ramp rates in the range of 200 °C s as advantageously used in ultra shallow junction processes [1] challenges temperature control in RTP technology. In order to design advanced...

This document provides general guidelines aimed at assisting the authors of RTP Payload Format specifications in deciding on good formats. These guidelines attempt to capture some of the experience gained with RTP as it evolved during its development.

Most customers in electricity markets do not face prices that change frequently to reflect changes in wholesale costs, known as real-time pricing (RTP). We show that not only does time-invariant pricing in competitive markets lead to prices and investment that are not first best, it even fails to achieve the constrained second-best optimum. Increasing the share of customers on RTP is likely to ...

Post-deposition rapid thermal annealing ~RTA! was performed on multilayered films consisting of a Mn capping layer on top of CoCrPt/CrTi/NiAl. High coercivities were achieved even at low M rt values and coercivity values increased more than that would have been predicted by the decrease in magnetization values. This is most likely due to the significant decrease in intergranular exchange coupli...

The tunneling magnetoresistance and perpendicular magnetic anisotropy in CoFeB(1.1-1.2 nm)/ MgO/CoFeB(1.2-1.7 nm) junctions were found to be very sensitively dependent on annealing time. During annealing at a given temperature, decay of magnetoresistance occurs much earlier compared to junctions with in-plane magnetic anisotropy. Through a rapid thermal annealing study, the decrease of magnetor...

The rapid thermal processing (RTP) technique features dynamic control of temperature, which permits high heating and cooling rates that cannot be reached with conventional furnace treatments. In recent years, RTP has been increasingly applied to the processing of magnetic materials. The controllable heating profiles provide an approach for the deliberate construction of materials structure via ...

With the recent emphasis on batch processing by the emerging industries like the microelectronics and biotechnology, the interest in batch process control has been renewed. In this paper, we present an overview of the Iterative Learning Control (ILC) technique, which can be used to improve tracking control performance in batch processes. We present the fundamental concepts and review the variou...