Issues in the LSI polyimide buffer coating process which uses photosensitive polyimide also as a mask of passivation film etching are reviewed. Change of lithography wave length from g-line to i-line causes the difficulty in the polyimide patterning. However, today's improved polymers, both ester type and ionic type, have enough ability to open 10 um windows. Dry etching condition must be adjus...

Tactile sensing is required for assistant robots. A new stacked sensor head was proposed which detects forces and thermal sensations with a nerve-net LSI chip. To measure temperatures and heat flows, the sensor head required a thin and small heater to heat up the sensor head. The features of the polyimide heater are compact, low heat capacity, low power consumption and ease of attaching it to t...

Considering the wide range of applications of metal–polymer composites, composite of Fe-polyimide has been obtained by plasma sputtering method, also polyimide films were treated with plasma. Comparative study of surface modification of the composite film and the polyimide film due to Fe doping and plasma treatment have been studied, using the contact angle measurement, scanning electron micros...

Polyimide nanotubes with tunable wall thickness were fabricated by a precursor impregnation method using an AAO template, and carbon nanotubes containing magnetic iron oxide were obtained using ferric chloride-embedded polyimide precursor by a carbonization process.

Polyimide/SiO(2) composite films were prepared from tetraethoxysilane (TEOS) and poly(amic acid) (PAA) based on aromatic diamine (4-aminophenyl sulfone) (4-APS) and aromatic dianhydride (3,3,4,4-benzophenonetetracarboxylic dianhydride) (BTDA) via a sol-gel process in N-methyl-2-pyrrolidinone (NMP). The prepared polyimide/SiO(2) composite films were characterized using X-ray diffraction (XRD), F...

Co-polyimide nanofiber based on BPDA (3, 30 , 4, 40-Biphenyltetracarboxylic dianhydride)/PDA (p-Phenylene-diamine)/ODA (4, 40-Oxydianiline) (BPO) were produced by electrospinning followed by imidization from precursor polyamic acid (PAA) nanofiber. The aligned co-polyimide nanofiber mats possessed a modulus, strength and strain-at-break of respective 10 GPa, 1.04 GPa, and 13.5%. In comparison w...

LLE Review, Volume 92 167 In 1996 LLE began a research effort to make spherical capsules from polyimide material for use in direct-drive inertial confinement fusion (ICF) experiments. Previously, ICF capsules were made exclusively from glass, polystyrene, or an amorphous carbon–hydrogen solid solution referred to as “plasma polymer” or “glow-discharge polymer.”1 Polyimide was first proposed as ...

In this work, the effects of chemical treatment of polyimide films were studied by FT-IR, X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and contact angles. The adhesion characteristics of the films were also investigated in the peel strengths of polyimide/aluminum films. The increases of surface functional groups of KOH-treated polyimide films were greatly correlated wit...

Kapton polyimde is extensively used in solar arrays, spacecraft thermal blankets, and space inflatable structures. Upon exposure to atomic oxygen in low Earth orbit (LEO), Kapton is severely eroded. An effective approach to prevent this erosion is to incorporate polyhedral oligomeric silsesquioxane (POSS) into the polyimide matrix by copolymerizing POSS monomers with the polyimide precursor. Th...

The measured and calculated propagation constant of coplanar waveguide (CPW) on low-resistivity silicon (1 cm) with a micromachined polyimide interface layer is presented in this paper. With this new structure, the attenuation (decibels per centimeter) of narrow CPW lines on low-resistivity silicon is comparable to the attenuation of narrow CPW lines on high-resistivity silicon. To achieve thes...