Energy harvester is a self-generating energy source which is able to run small scale electronic devices. It largely reduces the dependency on external power source. This paper represents the utilization of micro cantilever beam to develop a vibration based electromechanical systems (MEMS) piezoelectric energy harvester system. The proposed micro cantilever part has been developed by finite elem...

Over the last few years the demand for miniature objects and devices has continuously increased. So the need for MEMS (Micro Electro Mechanical Systems) and MOEMS (Micro Opto Electro Mechanical Systems) in various fields has become more and more important. New micromanipulation technologies must be developed that take into account the specificities of MEMS and MOEMS. For performing manipulation...

The most promising method for micro scale energy scavenging is via vibration energy harvesting which converts mechanical energy to electrical energy. Using piezoelectric cantilevers is the most common method for vibration energy harvesting. Changing the shape of the cantilevers can lead to changing the generated output voltage and power. In this work vibration energy harvesting via piezoelectri...

A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacoustic spectroscopy is performed to detect oil-soluble gas in transformers, a micro-cantilever beam ...

We show here that dynamic-mode cantilever sensors enable acoustofluidic fluid mixing and trapping of suspended particles as well as the rapid manipulation and release of trapped micro-particles via mode switching in liquid. Resonant modes of piezoelectric cantilever sensors over the 0 to 8 MHz frequency range are investigated. Sensor impedance response, flow visualization studies using dye and ...

Vibration energy harvesting with piezoelectric materials currently generate up to 300 microwatts per cm2, using it to be mooted as an appropriate method of energy harvesting for powering low-power electronics. One of the important problems in bimorph piezoelectric energy harvesting is the generation of the highest power with the lowest weight. In this paper the effect of the shape and geometry ...

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This paper presents the design and fabrication of a novel piezoelectric actuator for a gas micro pump with check valve having the advantages of miniature size, light weight and low power consumption. The micro pump is designed to have eight major components, namely a stainless steel upper cover layer, a piezoelectric actuator, a stainless steel diaphragm, a PDMS chamber layer, two stainless ste...

This paper presents a self-actuating biosensor based on the piezoelectric cantilever optimized by Taguchi method for the label-free detection of specific biomoleculars. Until now, even though the optimisation of the cantilever-based biosensors have been performed by changing dimensions one by one, few researches have performed the geometric optimisation considering the overall configuration of ...

In this paper, a Micro – Electrical Mechanical System (MEMS) energy harvester is developed, using the phenomenon of Piezoelectricity. Zinc Oxide (ZnO) was chosen as the piezoelectric material. A multi – d31 mode cantilever design was used with varying dimensions of cantilever, to form an array. The individual cantilevers can be either connected in series or parallel to achieve different output ...