A method based on the sidewall transfer technique for fabricating two-dimensional (2D) nano-mold on a silicon substrate was developed. Instead of using expensive nanolithography, the authors fabricated 2D silicon nano-mold using standard ultraviolet lithography, conformal deposition of gold by radio frequency sputtering, argon sputter etching and deep reactive ion etching (DRIE). This technique...

This article deals with the mechanical analysis of a fixed-fixed nano-beam based on nonlocal elasticity theory. The nano-beam is sandwiched with two piezoelectric layers through it’s upper and lower sides. The electromechanical coupled equations governing the problem are derived based nonlocal theory considering to Euler-Bernoulli beam assumptions and based on the nonlocal piezoelectricity acco...

Displacement finite element models of various beam theories have been developed traditionally using conventional finite element basis functions (i.e., cubic Hermite, equi-spaced Lagrange interpolation functions, or spectral/hp Legendre functions). Various finite element models of beams differ from each other in the choice of the interpolation functions used for the transverse deflection w, tota...

We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in Al2O3 channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewa...

Nonlinear behavior of a functionally graded cantilever beam is analyzed under non-uniform hygro-thermal effect. To solve this problem, finite element method is applied within plane solid continua. Total Lagrangian approach is utilized in the nonlinear kinematic relations. Newton-Raphson method with incremental displacement is used in nonlinear solution. Comparison study is performed. Effects of...

A technique developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel “paddle” cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distribution. Standard clean room processing was used to pre...

In this article, small scale effects on free vibration analysis of non-uniform nanobeams is discussed. Small scale effects are modelled after Eringen’s nonlocal elasticity theory while the non-uniformity is presented by exponentially varying width among the beams length with constant thickness. Analytical solution is achieved for free vibration with different boundary conditions. It is shown th...

With nanotechnology becoming widely used, many applications such as plasmonics, sensors, storage devices, solar cells, nano-filtration and artificial kidneys require the structures with large areas of uniform periodic nanopatterns. Most of the current nano-manufacturing techniques, including photolithography, electron-beam lithography, and focal ion beam milling, are either slow or expensive to...

The fringe field effects of nano-electromechanical (NEM) nonvolatile memory cells have been investigated analytically for the accurate evaluation of NEM memory cells. As the beam width is scaled down, fringe field effect becomes more severe. It has been observed that pull-in, release and hysteresis voltage decrease more than our prediction. Also, the fringe field on cell characteristics has bee...