Abstract The adequate modeling of the micro/nano arc resonators' dynamics is vital for their successful implementation. Here, a size-dependent model, wherein material structure, porosity, and micro-rotation effects grains are considered, derived by combining couple stress theory, multi-phase classical Euler–Bernoulli beam aiming to characterize frequency tunability resonators as monitoring eith...

Electric switching of reflection resonances at near-IR spectral range is experimentally demonstrated in a reflective metamaterial twisted nematic liquid crystal cell. Reflective metamaterial composed of nano-sized double-split ring resonator aperture is fabricated by a focused ion beam milling. Two-fold rotational symmetry of double-split ring resonators allows for two orthogonal polarization-d...

Following the recent observation of localised phonon polaritons in user-defined silicon carbide nano-resonators, here we demonstrate coherent coupling between those localised modes and propagating phonon polaritons bound to the surface of the nano-resonator’s substrate. In order to obtain phase-matching, the nano-resonators have been fabricated to serve the double function of hosting the locali...

This paper reports on the fabrication and characterization of high-quality factor (Q) single crystal silicon (SCS) in-plane capacitive beam resonators with sub-100 nm to submicron transduction gaps using the HARPSS process. The resonating element is made of single crystal silicon while the drive and sense electrodes are made of trench-refilled polysilicon, yielding an allsilicon capacitive micr...

Advances in nano-fabrication techniques has made it feasible to observe damping phenomena beyond the linear regime nano-mechanical systems. In this work, we report cubic non-linear palladium resonators. Nano-scale beams exposed a $H_2$ atmosphere become softer and display enhanced Duffing non-linearity as well at ultra low temperatures. The is highest lowest temperatures of $\sim 110\: mK$ decr...

Metasurfaces created artificially with metal nanostructures that are patterned on surfaces of different media have shown to possess "unusual" abilities to manipulate light. Limited by nanofabrication difficulties, so far most reported works have been based on 2D metal structures. We have recently developed an advanced e-beam process that allowed for the deposition of 3D nanostructures, namely v...

This paper investigates damping ratio in micro-beam resonators based on magneto-thermo-elasticity. A unique aspect of the present study is the effect of permanent magnetic field on the stiffness and thermo-elastic damping of the micro resonators. In our modeling the theory of thermo-elasticity with interacting of an externally applied permanent magnetic field is taken into account. Combined the...

Metal nanostructures at sub-wavelength scale have been used as plasmonic diffraction gratings and negative index metamaterials and have attracted interests in materials engineering and optics research. E-beam lithography is commonly used to fabricate these metal nanostructures; however, e-beam lithography has limitation in scale-up of nanostructure fabrication and is expensive. In this study, a...

Drawing inspiration from radio-frequency technologies, we propose a realization of nano-scale optical dielectric resonator antennas (DRAs) functioning in their fundamental mode. These DRAs operate via displacement current in a low-loss high-permittivity dielectric, resulting in reduced energy dissipation in the resonators. The designed nonuniform planar DRA array on a metallic plane imparts a s...

Title of dissertation: PIEZOELECTRIC MICROBEAM RESONATORS BASED ON EPITAXIAL Al0.3Ga0.7As FILMS Lihua Li, Doctor of Philosophy, 2005 Dissertation directed by: Professor Don DeVoe Department of Mechanical Engineering In this work, piezoelectric resonators based on single crystal Al0.3Ga0.7As films are implemented. The combination of Si doped Al0.3Ga0.7As as electrode layers and moderate piezoele...