Intrinsic localized modes (ILMs) have been observed in micromechanical cantilever arrays, and their creation, locking, interaction, and relaxation dynamics in the presence of a driver have been studied. The micromechanical array is fabricated in a 300 nm thick silicon-nitride film on a silicon substrate, and consists of up to 248 cantilevers of two alternating lengths. To observe the ILMs in th...

This work presents measured results demonstrating an uncooled infrared (IR) detector based on gallium nitride (GaN) micromechanical resonators. GaN-based photonic detectors are typically designed to operate in the ultraviolet (UV) regime as the absorption spectrum of wide-band gap GaN peaks at a wavelength of ~360 nm. In contrast, the transduction mechanism of the device presented in this work ...

In diseases such as cancer or during viral infections gene expression is greatly altered. These changes in gene activity can be analysed at different levels of cellular activity, like transcription activation, transcription and translation. Currently, no simple method is available to detect all these biochemical signals simultaneously and rapidly. Micromechanical cantilever sensor array technol...

The quartz crystal used in the reference oscillator in a wireless communication transceiver is among the most difficult to integrate on chip. On-chip devices capable of matching its Q (on the order of 10,000) and temperature stability (<35ppm over 0-70C) are generally unavailable. Recently, an on-chip vibrating clamped-clamped beam (CC-beam) micromechanical resonator based on MEMS technology ha...

A bulk acoustic mode micro-electro-mechanical dual resonator platform is utilised to study the evaporation of sub-microliter water droplets from the surface of the resonator. An analytical formulation for the observed frequency shift and the measure dependence of resonant frequency on the modes of evaporation which is consistent with the optically derived data. The resonators access only a thin...

We have measured the backaction of a dc superconducting quantum interference device (SQUID) position detector on an integrated 1 MHz flexural resonator. The frequency and quality factor of the micromechanical resonator can be tuned with bias current and applied magnetic flux. The backaction is caused by the Lorentz force due to the change in circulating current when the resonator displaces. The...

Beam-steering techniques are required to fully exploit terahertz imaging systems. We propose and model a device employing artificial dielectric techniques to provide a variable phase-control medium. The device consists of two interlocking artificial dielectric surfaces that are initially aligned parallel to each other. By mechanically introducing a relative tilt between the plates, a transmitte...