Recent advances in the fabrication of microflow devices using micro-electromechanical systems (MEMS) technology are described. Passive and active liquid flow control and particle-handling methods in micrometer-scale channels are reviewed. These methods are useful in micro total analysis systems (μTAS) and laboratory-on-a-chip systems. Multiple flow control systems (i.e., arrayed microvalves) fo...

Micro Electromechanical Systems (MEMS) have been proved to be outstanding tools for micromachines. The current article is intended to produce an assessment of MEMS used in a wide scale in various spheres, nearly 30 years after their initial development.Conventional sensors are now aptly supported by advanced technologies. Micro Electromechanical Sensors form a class of sensors which are sensiti...

New technologies based on micro-technology, so called MEMS (Micro ElectroMechanical Systems), have been enabling many new products over the last ten years such as inkjet printers, displays or pressure sensors. Focusing on measurement of motion, MEMS inertial sensors such as accelerometers and gyroscopes, open new application fi elds for three big branches: Testing of MEMS based Inertial Sensors...

The paper demonstrates the use of probabilistic methods to assess the electromechanical behavior of micro electromechanical systems (MEMS) under the presence of micromachining manufacturing and process uncertainties. Probabilistic Methods are used to assess uncertainties involved in the manufacturing of MEMS devices. Probabilistic methods guide the design of these devices to achieve a robust an...

As the United States (U.S.) Army transforms into a lighter, more lethal, and more agile force, the technologies embedded in both legacy and emerging weapon systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the Army as well as entire Department of Defense (DOD). Even though the DOD plans to increase the usage of ME...

Researchers have been looking for alternatives of expensive conventional accelerometers in vibration measurements. Micro-ElectroMechanical Systems (MEMS) accelerometer is one of the available options. Here the performance of one of these MEMS accelerometers compared with a well known commercial accelerometer.

For years, chaotic phenomena have been mainly studied from a theoretical point of view. In the last two decades, considerable developments have occurred in the control, prediction and observation of chaotic behaviour in a wide variety of dynamical systems, and a large number of applications have been discovered and reported (Moon & Holmes, 1999; Endo & Chua, 1991; Kennedy, 1993). Chaotic behavi...

Suspended single-walled carbon nanotubes (SWCNTs) offer unique functionalities for electronic and electromechanical systems. Due to their outstanding flexible nature, suspended SWCNT architectures have great potential for integration into flexible electronic systems. However, current techniques for integrating SWCNT architectures with flexible substrates are largely absent, especially in a mann...

In recent years, the scaling of microelectronic, photonic and micro-electromechanical systems (MEMS) to the 50-500 nm length scale has challenged the capability of conventional micro-fabrication technologies in the cost-effective, mass production of devices and integrated systems [1]. There is an increasing need to develop new nano-fabrication technologies to address the challenges of decreasin...