A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems (MEMS) is presented. In the NODAS methodology ( NO dal Design of Actuators and Sensors), microaccelerometers and microgyroscopes are designed as netlists of general-purpose micromechanical beams, plates, electrostatic gaps, joints, and anchors and ev...

In this paper, a digital rebalance loop for MEMS gyroscope is designed and its performance test is performed. First, the system model of MEMS gyroscope is established by dynamic analysis. Then, the digital rebalance loop is designed using modern control technique. The performance of the digital rebalance loop is compared with that of conventional PID rebalance loop. Through frequency response a...

In this paper, a neural sliding mode control approach is developed to adjust the gain using radial basis function (RBF) network (NN) for tracking of Microelectromechanical Systems (MEMS) triaxial vibratory gyroscope. First with fixed proposed assure asymptotic stability closed loop system. Then RBF derived gradient method in switching law. With adaptive learning network, chattering phenomenon e...

This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the force-rebalance operations are derived by using an averaged PSD model and an equivalent transfer fu...

Non-contact testing is an important method for the study of the vibrating characteristic of cylindrical resonators. For the vibratory cylinder gyroscope excited by piezo-electric electrodes, mode testing of the cylindrical resonator is difficult. In this paper, a novel vibration testing method for cylindrical resonators is proposed. This method uses a MEMS microphone, which has the characterist...

This paper presents detailed performance status and projections for the silicon MEMS Quadruple Mass Gyroscope (QMG) – a unique high Q, lumped mass, mode-symmetric Class II Coriolis Vibratory Gyroscope (CVG) with interchangeable whole angle, self-calibration, and force rebalance mechanizations. Analysis of a QMG sealed without getter with a Q-factor of 1e3 reveals an Angle Random Walk (ARW) of 0...

There are several application areas where the simultaneous measurement of rates of rotation about three mutually orthogonal axes is required. In this paper the principle features of a 3-axis vibrating ring gyroscope are described. The fabrication process for the gyroscope is presented and employs standard MEMS techniques. The modal properties for the ring are measured experimentally using laser...