MEMS optical switch technology is one of the key technologies in Wavelength Division Multiplexing (WDM) optical networks. Although the 2-D MEMS optical switch technology is mature, the commonly used crossbar architecture is not amenable to building large switches. In this paper, we propose a design of 2 × 2 switching modules, and use it to build large 2-D MEMS optical switches with architecture...

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems.Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applicati...

RF-MEMS technology has the potential of replacing many of the mechanical and semiconductor switches used in mobile and satellite communication systems. In many cases, such RF-MEMS switches would not only reduce substantially the size and power consumption, but also promise superior performance. The paper reviews the recent development of RF MEMS switches and switch matrices. Several configurati...

This paper presents a study of RF MEMS switch designed to be integrated in tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, we go into detail of each procedure to present a complete study from design to fabrication and characterization of a RF-MEMS switch. The proposed concepts are validated by experimental results.

This paper presents the design of a V-band switched-line phase shifter using SP4T RF-MEMS switches. Sonnet simulations are used to achieve accurate circuit models of both the RF-MEMS switches as well as CPW bends within the phase shifter. The V-band phase shifter utilizes two SP4T RF-MEMS switches to perform the delay line switching. The RF performance of the SP4T MEMS switch is optimized to ad...

An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.

This paper presents the work realized on a new RF MEMS design for micro-switch application. This design relies on the separation between the commutation and actuation electrodes for improving the switch lifetime. The design can reduce electrical charging effects during the actuation by preventing a direct contact with the actuation electrode. The proposed structure is optimized by addressing ke...

RF MEMS switches can be used to achieve reconfigurability of various RF systems and in particularly for miniaturized antenna structures. In case of micro machined antennas, which involve low voltage signals, RF MEMS switches with low actuation voltage are required for achieving reconfigurability. The capacitive shunt switch derives its switching property from the significant difference of its c...

The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional communication components because they consume less DC power, have lower losses, higher linearity and higher Q factor. However, the commercialization of RF MEMS devices is hindered by technological issues such as their...