This paper reports on the state of the art silicon micromachined microphone utilizing a dual poly silicon membrane system. MEMS chips from 1.4mm down to 1.0mm side length are applied for mobile communication. Design aspects related with key performance parameters such as sensitivity, signal to noise ration and distortion are discussed. Sensitivity of -38BV/Pa is achieved for different microphon...

In this work the reliability of a Micro-Electro-Mechanical Systems (MEMS) microphone is studied through two accelerated life tests, mixed flowing gas (MFG) testing and shock impact testing. The objective is to identify the associated failure mechanisms and improve the reliability of MEMS devices. Failure analyses are carried out by using various tools, such as optical microscopy, scanning elect...

In this paper, we proposed a MEMS capacitive microphone with a dual-anchored membrane. The proposed dual anchor could minimize the deviation of operating characteristics of the membrane according to the fabrication process variation. The membrane is connected and fixed to the back plate insulating silicon nitride structures instead to the sacrificial bottom insulating oxide layer so that its ef...

We present a MEMS microphone that converts the mechanical motion of a diaphragm, generated by acoustic waves, to an electrical output voltage by capacitive fingers. The sensitivity of a microphone is one of the most important properties of its design. The sensitivity is proportional to the applied bias voltage. However, it is limited by the pull-in voltage, which causes the parallel plates to c...

The paper deals with method and methodology for calibration of the whole microphone array without the need of dismounting of each microphone and calibrating separately. This situation is usual with MEMS transducers which cannon be dismantled from the frame. The method is based on generation of spherical acoustic wave propagating in free-field and synchronously received by all microphones in the...

In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

We revisit the standard differential microphone of [1] and propose three algorithmic enhancements. First, a simple alignment procedure equalizes the power levels of the input signals. Second, we describe an efficient algorithm to equalize the distorted directional response of the original algorithm. This enables a wider operating frequency range and helps to reduce the noise gain of the array. ...