This article describes an accurate subPico flowmeter bifurcatedin to liquid and gas flowrates less than 1mol/s for both MEMS/NEMS and cryogenic technology applications. The MEMS/NEMS are described as either two Gauges (instrument), or quartz fluctuating forks, even if the liquid or gas flows through an element, as well as cryogenic technology consisting of arrays of e...

This review focuses on recent advances in microand nano-fabrication techniques and their applications to electrochemical power devices, specifically microfabricated Lithium-ion batteries, enzymatic and microbial fuel cells (biofuel cells), and dye-sensitized solar cells (DSSCs). Although the maturity of these three technologies ranges from market ready (batteries) to fundamental research (biofu...

Carbon microelectromechanical system (C-MEMS) and carbon nanoelectromechanical (C-NEMS) have been identified as promising technologies for a range of biotech applications, including electrochemical biosensors, biofuel cells, neural probes, dielectrophoretic cell trapping. Research teams around the world devoted more time to this field. After almost two decades efforts on developing C-MEMS C-NEM...

The physics of operation of nanotube NEMS devices is reviewed. Special attention is paid to non-classical effects, rarely described in MEMS analysis, such as van der Waals/Casimir interactions, quantum effects in electrostatics, atomistic parameterization of elasticity. As an example of a breakdown of a classical MEMS theory, the NEMS scaling limitation is derived in a lump model taking into ac...

Three-dimensional (3D) integration of microand nano-electromechanical systems (MEMS/NEMS) with integrated circuits (ICs) is an emerging technology that offers great advantages over conventional state-of-the-art microelectronics. MEMS and NEMS are most commonly employed as sensor and actuator components that enable a vast array of functionalities typically not attainable by conventional ICs. 3D ...

© 2014 Materials Research Society MRS BULLETIN • VOLUME 39 • JUNE 2014 • www.mrs.org/bulletin Introduction Chemical vapor deposition (CVD) diamond fi lm technology has experienced modest growth in the last two decades in terms of scientifi c and technological advances in the fi eld, which has, ultimately, positively affected progress in diamondbased microelectromechanical/nanoelectromechanical ...

Abstract A comprehensive review is presented on the advances achieved in past years fundamental and applied materials science of diamond films engineering to integrate them into new generations microelectromechanical system (MEMS) nanoelectromechanical systems (NEMS). Specifically, focuses describing performed develop thin film synthesis processes characterization chemical, mechanical, tribolog...

The polymer polyvinylidene difluoride (PVDF) has unique piezoelectric properties favorable for Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) applications. In the present research, we conducted nanometer-length scale characterization of this material using several high-resolution techniques. Specifically, we used an atomic force microscope (AFM) to study the ...

Post-processing techniques are applied after the integration and assembly of nanostructures and Microelectromechanical Systems (MEMS) o realize integrated Nanoelectromechanical Systems (NEMS). Experimentation is focused specifically on the application of post-processing teps to a locally self-assembled micro-to-nano system comprising of suspended silicon nanowires between two MEMS bridges. Loca...