Optical proximity correction (OPC) and phase shifting masks (PSM) are resolution enhancement techniques (RET) used extensively in the semiconductor industry to improve the resolution and pattern fidelity of optical lithography. In this paper, we develop generalized gradient-based RET optimization methods to solve for the inverse lithography problem, where the search space is not constrained to ...

The continuous shrinkage of minimum feature size in integrated circuit (IC) fabrication incurs more and more serious distortion in the optical projection lithography process, generating circuit patterns that deviate significantly from the desired ones. Conventional resolution enhancement techniques (RETs) are facing critical challenges in compensating such increasingly severe distortion. In thi...

This paper studies a method of shifting poles of linear constant systems via LQ optimal feedback. By making use of a solution to the so-called inverse regulator problem, this method enables us to shift poles successively by pairs while maintaining the well-known advantages of LQ regulators. Polynomial fractional representation is effectively used both to characterize the maximal pole-assignable...

The multiplicative inversion operation is a fundamental computation in several cryptographic applications. In this work, we propose a scalable VLSI hardware to compute the Montgomery modular inverse in GF(p). We suggest a new correction phase for a previously proposed almost Montgomery inverse algorithm to calculate the inversion in hardware. We also propose an efficient hardware algorithm to c...

Computing the inverse of a number in finite fields GF(p) or GF(2) is equally important for cryptographic applications. This paper proposes a novel scalable and unified architecture for a Montgomery inverse hardware that operates in both GF(p) and GF(2) fields. We adjust and modify a GF(2) Montgomery inverse algorithm to accommodate multi-bit shifting hardware, making it very similar to a previo...

Computing the inverse of a number in finite fields GF(p) or GF(2) is equally important for cryptographic applications. This paper proposes a novel scalable and unified architecture for a Montgomery inverse hardware that operates in both GF(p) and GF(2) fields. We adjust and modify a GF(2) Montgomery inverse algorithm to accommodate multi-bit shifting hardware, making it very similar to a previo...

This paper is part 3 in a series of papers about the Discrete Fourier Transform (DFT) and the Inverse Discrete Fourier Transform (IDFT). The focus of this paper is on computing the Power Spectral Density (PSD) of the FFT (Fast Fourier Transform) and the IFFT (Inverse Fast Fourier Transform). The implementation is based on a well-known algorithm, called the decimation in time Radix 2 FFT, and re...

approved: The computation of th GF(p) or GF(2), is one o applications. In this work, w the design of efficient hard inverse. We suggest a new c inverse algorithm to calcula a fast hardware algorithm proposed designs have the h on constrained areas and sti calculations, the module w module operates, can be se upper limit on the operand operands and internal resul infinite-precision Montgome We a...

Fringe Pattern Profilometry (FPP) is 3D surface measuring technique based on triangulation. The utilization of digital projection in FPP system introduces significant phase distortion for Phase Shifting Profilometry (PSP), because of the nonlinear response of digital video projectors, which is referred as gamma distortion. Considering that the distorted phase has a stable function for a referen...