Using supported ionic-liquid membrane (SILM)-inspired methodologies, we have synthesized, characterized, and developed a humidity sensor by coating a liquid composite material onto a hygroscopic, porous substrate. Similar to pH paper, the sensor responds to the environment's relative humidity and changes color accordingly. The humidity indicator is prepared by casting a few microliters of low-t...

In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows that GO sensing material has a strong and sharp (002) peak at about 10.278°, whereas graphite has (...

Online monitoring humidity in the proton exchange membrane (PEM) fuel cell is an important issue in maintaining proper membrane humidity. The cost and size of existing sensors for monitoring humidity are prohibitive for online measurements. Online prediction of humidity using readily available measured data would be beneficial to water management. In this paper, a novel soft sensor method based...

Since humidity sensors have been widely used in many sectors, a suitable humidity sensing material with improved sensitivity, faster response and recovery times, better stability and low hysteresis is necessary to be developed. Here, we fabricate a uniformly porous humidity sensor using Ca, Ti substituted Mg ferrites with chemical formula of CaMgFe1.33Ti₃O12 as humidity sensing materials by sol...

A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm) integrated a humidity sensor, an interface circuit, a digital contro...

This paper presents a passive wireless humidity sensor for concrete monitoring. After discussing the transmission of electromagnetic wave in concrete, a novel architecture of wireless humidity sensor, based on Ultra-High Frequency (UHF) Radio Frequency Identification (RFID) technology, is proposed for low-power application. The humidity sensor utilizes the top metal layer to form the interdigit...

The problem of abnormally dry bias induced by radiosonde humidity sensor failure in the low and midtroposphere is studied based on the global operational radiosonde relative humidity observations from December 2008 to November 2009. The concurrent humidity retrievals from the FORMOSAT-3/COSMIC radio occultation mission are also used to assess the quality of the radiosonde humidity observations....