Abstract Atom probe tomography (APT) helps elucidate the link between nanoscale chemical variations and physical properties, but it has a limited structural resolution. Field ion microscopy (FIM), predecessor technique to APT, is capable of attaining atomic resolution along certain sets crystallographic planes albeit at expense elemental identification. We demonstrate how two commercially avail...

A scanning tunneling microscope (STM) equipped with a field ion microscope (FIM) which operates at room temperature has been constructed and operated successfully to obtain atomically resolved STM images with 100% reproducibility. This instrument, which we call the FI-STM, has been employed for the quantitative study of the Si(100) "2xn" phase.