The IBA DataFurnace (NDF) is a general purpose program for analysis of IBA data. It currently includes Rutherford backscattering (RBS), elastic (non-Rutherford) backsscattering (EBS), elastic recoil detection analysis (ERDA), non-resonant nuclear reaction analysis (NRA), and particle induced X-ray emission (PIXE). Here we discuss recent developments in the advanced physics capabilities implemen...

This manuscript describes our experimental work being carried out to develop the previously published T-ERDA technique measure H distribution in solids [Yamazaki et al., AIP Adv. 9 (2019) 105111]. From experiments for samples with markers, we have identified factors that degrade depth resolution analysis of distribution, depending on acceptance conditions detector.

Hydrogen incorporation in silicon layers prepared by plasma-enhanced chemical-vapor deposition using silane dilution by hydrogen has been studied by infrared spectroscopy ~IR! and elastic recoil detection analysis ~ERDA!. The large range of silane dilution investigated can be divided into an amorphous and a microcrystalline zone. These two zones are separated by a narrow transition zone at a di...

Amorphous hydrogenated silicon nitride films have been deposited by the electron cyclotron resonance plasma technique, using N2 and SiH4 as precursor gases. The gas flow ratio, deposition temperature and microwave power have been varied in order to study their effect on the properties of the films, which were characterized by Rutherford back-scattering spectrometry, elastic recoil detection ana...