نتایج جستجو برای: dc magnetron sputtering
تعداد نتایج: 63723 فیلتر نتایج به سال:
We present results on the in situ, two-dimensional growth sas opposed to the more commonly encountered island-coalescence mechanismd of continuous epitaxial Cu2O films on MgOs011d using dc facing-magnetron sputtering from metallic Cu targets in an oxygen/argon atmosphere. Film growth was studied as a function of deposition time and the dc power applied to the guns. Control of the latter leads t...
The morphology and grown mechanism of aluminum films from 3nm to 30nm in thickness onto thermal SiO2 on Si(100) substrates have been studied by atomic force microscopy and TCR measurement. The thin films prepared by dc magnetron sputtering at 450°C is composed of islands of aluminum. The island density, distribution of island size, height, and shape are studied.
Nb/Cu superconducting superlattices have been fabricated by dc magnetron sputtering. This system shows a vortex glass transition with critical exponents similar to high temperatures super-conductors exponents. The transition dymensionality is governed by the superconducting coupling regime. The vortex glass transition shows a pure two dimensional behavior in decoupled superlat-tices and a quasi...
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We have studied the effects of placing Co/Pt multilayers on dysprosium-iron-garnet doped with bismuth and aluminum. The garnet was deposited by RF-magnetron sputtering and crystallized by rapid thermal annealing. The Co/Pt multilayers were then deposited by DC-magnetron sputtering. The garnet thickness was held constant at lOOOA while the ColPt multilayer had the form of [3ACo/9APt], with n ran...
We have studied the easy-axis reorientation of Ni/Pd multilayer with varying Ar sputtering pressure. All the Ni/Pd multilayers prepared by dc-magnetron sputtering at an Ar sputtering pressure of 2 mTorr show in-plane magnetic anisotropy. However, room-temperature perpendicular magnetic anisotropy was observed in Ni/Pd multilayers prepared at an Ar sputtering pressure of 7 mTorr. To understand t...
Scandium containing multilayers have been produced with very high reflectivity in the soft x-ray spectrum. Accurate optical constants are required in order to model the multilayer reflectivity. Since there are relatively few measurements of the optical constants of Scandium in the soft x-ray region we have performed measurements over the energy range of 50-1,300 eV. Thin films of Scandium were ...
We have deposited Ti-Si-C thin films using high-power impulse magnetron sputtering (HIPIMS) from a Ti3SiC2 compound target. The as-deposited films were composite materials with TiC as the main crystalline constituent. X-ray diffraction and photoelectron spectroscopy indicated that they also contained amorphous SiC, and for films deposited on inclined substrates, crystalline Ti5Si3Cx. The film m...
Copper thin films with nano-scale structure have numerous applications in modern technology. In this work, Cu thin films with different thicknesses from 50–220 nm have been deposited on glass substrate by DC magnetron sputtering technique at room temperature in pure Ar gas. The sputtering time was considered in 4, 8, 12 and 16 min, respectively. The thickness effect on the structural, mo...
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