The techniques of dummy fill and reverse etchback are often used prior to a chemical mechanical polishing (CMP) process to prevent film pattern density mismatches that lead to post-CMP film thickness variation. In this work, we present a methodology that utilizes both techniques in an intelligent fashion, and shows that both techniques can be used together to create a better balance of pattern ...

Fluctuation scaling reports on all processes producing a data set. Some fluctuation scaling relationships, such as the Horwitz curve, follow exponential dispersion models which have useful properties. The mean-variance method applied to Poisson distributed data is a special case of these properties allowing the gain of a system to be measured. Here, a general method is described for investigati...

The electrical response of a pigmented lipid bilayer to a short laser pulse is measured by a tunable voltage clamp method. In this method, a variable access impedance permits "tuning" of the observed relaxations for optimal measurements. Analysis of the data so obtained leads to an equivalent circuit that contains a novel chemical capacitance charged by the specific photoreaction across a singl...