The paper describes the performance analysis, structural design and fabrication of piezoresistive pressure sensor using simulation technique. A polysilicon double nano-wire piezoresistor was fabricated by means of RIE (reactive ion etching). The polysilicon double nanowire pressure sensor has 100x100nm cross section area and has a thickness about 10nm. Finite element method (FEM) is adopted to ...

The goal of this research was to fabricate and characterize vertically aligned silicon nanowire gas sensors. Silicon nanowires are very attractive for gas sensing applications and vertically aligned silicon nanowires are preferred over horizontal nanowires for gas sensing due to the high density of nanowire arrays and the increased nanowire surface area per substrate area. However, the developm...

In this work is used the two-dimensional discrete wavelet transform as a feature extractor of time responses from a porous silicon optical gas sensor for gas identification. The wavelet decomposition allows us to have a more in-deep sight of the sensor response. In addition, using a linear support vector machine (SVM) as classifier we evaluate our approach for a six-analyte discrimination problem.

Miniaturized detection systems for nanometer-sized airborne particles are in demand, as in applications for onboard diagnostics downstream particulate filters in modern diesel engines. A soot sensor based on resistivity measurements was developed and characterized. This involved generation of soot particles with properties similar to diesel engines using a quenched co-flow diffusion flame; depo...

Sagem is presently working on a new project for the Japanese HISUI instrument made from a Hyper Spectral Sensor and a Multi Spectral Sensor, both including a Three Mirror Anastigmat (TMA) main optics. Mirrors are made from Zerodur from Schott but also from NTSIC, the New Technology Silicon Carbide developed in Japan. This report is also the opportunity to show to the community Sagem recent prog...

To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics an...

We studied a refractive index sensor that consists of two cascaded ring resonators and that works analogously to a Vernier-scale. We implemented it in silicon-on-insulator and experimentally determined its sensitivity to be as high as 2169 nm/RIU in aqueous environment. We derived formulas describing the sensor's operation, and introduced a fitting procedure that allows to accurately detect cha...

Palladium (Pd) is considered as ideal hydrogen sensing material due to its properties as high sensitivity and selectivity to hydrogen gas, fast response and reversible room temperature operation.Silicon nanowire (SiNW) functionalized with Pd based hydrogen gas nanowire sensor having quantum confinement effect and high sensitivity because of high surface to volume ratio of SiNW. This paper highl...