A novel pulsed rapid thermal processing (PRTP) method has been used for realizing the solid-phase crystallization of amorphous silicon films prepared by PECVD. The microstructure and surface morphology of the crystallized films are investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicate that this PRTP is a suitable postcrystallization technique for fabric...

We present a systematic method for developing low order nonlinear models from physically based, large scale finite element models of rapid thermal processing (RTP) systems. These low order models are extracted from transient results of a detailed finite element model using the proper orthogonal decomposition (POD) method. Eigenfunctions obtained from the POD method are then used as basis functi...

The substantial reductions in anneal times, such as in flash-assist rapid thermal processing !fRTP", place considerably more emphasis on the initial condition of the wafer, which may assume a greater role in the dictating diffusion product !Dt". Investigations have been conducted on the effect of low-temperature preanneals prior to fRTP on the extended defect nucleation and evolution and on bor...

This paper presents a learning approach for wafer temperature control in a rapid thermal processing system (RTP). RTP is very important for semiconductor processing system and requires an accurate trajectory following. Numerous studies have addressed this problem and most research on this problem requires exact knowledge of the system dynamics. The various approaches do not guarantee the desire...

Bubbles in organic light-emitting diodes can be formed from gas release due to Joule heating effect at localized electrical shorts during operation, which could be simulated by a rapid thermal annealing. The gases in the bubbles consist of not only adsorbed moistures but also the decomposed organic species, which are detected in situ in an ultrahigh vacuum chamber. In the device of Al/tris-~8-h...

The effects of annealing on the crystal structure and magnetic properties of Co-rich cobalt platinum nanowire arrays embedded in anodic aluminium oxide membranes have been investigated. For this purpose, a rapid thermal annealing to temperatures of 300 °C to 800 °C has been used. Transmission electron microscopy and scanning electron microscopy show that the nanowires have a mean diameter of 14...