The synthesis of a composite material based on graphitic carbon nitride by pyrolytic decomposition at 550 °C mechanical mixture thiourea with the addition aluminum powder in amount 5–30 wt.% has been studied. According to scanning results means electron microscopy, energy dispersive X-ray spectroscopy, and diffractometry synthesized consists nitride, sulfide, residual metallic hydroxide. excess...

A gas-phase, room-temperature, plasmaless isotropic etching system has been used for bulk and thin lm silicon etching. A computer controlled multi-chambered etcher is used to provide precisely metered pulses of xenon di uoride (XeF2) gas to the etch chamber. Etch rates as high as 15 microns per minute have been observed. The etch appears to have in nite selectivity to many common thin lms, incl...

It was shown that elastic waves propagating out-of-plane in a two-dimensional phononic crystal can experience full-band-gaps for nonzero values of the wave-vector component parallel to the rods. By further inserting a rod defect, it is demonstrated that modes propagating along the rod defect can be localized within the band-gaps of the phononic crystal. Such waveguide modes are exhibited for a ...

In this work, visible electroluminescence (EL) from aluminum nitride (AlN) thin film containing aluminum nanocrystals (nc-Al) prepared by a radio frequency sputtering technique is reported. The yellow EL shows a spectrum peaked at 565 nm. A linear relationship between the EL and the current transport in the nc-Al/AlN nanocomposite thin film is observed, and both the current transport and the EL...

Photostimulable storage phosphors have been used in a wide range of applications including radiation measurements in oneand two-dimensional spaces, called point dosimetry and radiography. In this work, we report that an aluminum nitride (AlN) ceramic plate, which is practically used as a heat sink (SHAPAL®, Tokuyama Corp., Yamaguchi, Japan), shows good optically-stimulated luminescence (OSL) pr...

Film bulk acoustic resonators (FBARs) are widely applied in mass bio-sensing and pressure sensors, owing to their extreme sensitivity and integration ability, and ability to miniaturize circuits. A volatile organic compound (VOC) sensor with a polymer-coated diaphragm, using FBARs as a strain sensing element is proposed and optimized. This vapor sensor is based on organic vapor-induced changes ...