Gary K. Fedder and Qi Jing1 Abstract A circuit-level methodology for hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. A layout-based schematic view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. As examples of the design methodology, suspended-MEMS inertial sen...

This Letter describes the fabrication of a microelectromechanical systems (MEMS) bimaterial terahertz (THz) sensor operating at 3.8 THz. The incident THz radiation is absorbed by a metamaterial structure integrated with the bimaterial. The absorber was designed with a resonant frequency matching the quantum cascade laser illumination source while simultaneously providing structural support, des...

This note describes the design, fabrication, and testing of a novel microelectromechanical systems Coulter counter. The Coulter counter will be used to detect and monitor impedance changes of cells as a function of time in response to different experimental extracellular environments. The device consists of SU-8 (negative photoresist) microchannels, vertical electroplated electrodes, polydimeth...

For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, ...

Nowdays there is an increasing requirement for magnetic devices with improved sensitivity and resolution, trying to keep as low as possible their cost and power consumption. Additionally there is the need to develop compact devices with several sensors able to measure different parameters including magnetic field, pressure, temperature, acceleration. In this way a multifunctional device could b...

www.polytec.com Crickets possess a hair array that can detect minute changes in air flow measuring particle velocity. It is one of the most sensitive sensory systems known to man. By understanding how this highly sensitive bio-sensor works, we open the door to engineering new sensors that substitute microelectromechanical systems (MEMS) technology for insect biology. The motivation for this res...

As RF technologies mature designing complex RF systems is becoming an increasingly difficult task. Modern systems include components that cannot be modeled with traditional simulators. This paper introduces a modeling technique for use in RF systems that combines Maxwell’s, mechanical, and solid-state equations. The resulting simulator can be used to simulate microelectromechanical structures (...

Drug delivery systems play a crucial role in the treatment and management of medical conditions. Microelectromechanical systems (MEMS) technologies have allowed the development of advanced miniaturized devices for medical and biological applications. This Review presents the use of MEMS technologies to produce drug delivery devices detailing the delivery mechanisms, device formats employed, and...