The load-balanced switch architecture is a promising way to scale router capacity. We explained in [1] how it can be used to build a 100Tb/s router with no centralized scheduler, no memory operating faster than the line-rate, no packet missequencing, a 100% throughput guarantee for all traffic patterns, and an optical switch fabric that simply spreads traffic evenly among linecards. This switch...

We present a comprehensive study on a high reliability RF-MEMS switch with an active thermal recovery capability to counteract stiction. Applying finite element (FE) simulations we investigate the complete recovery process including mechanical, electrical, thermal and fluidic effects. The experimentally calibrated thermo-mechanical FE-model is used to extract key parameters of the recovery proc...

This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have been monolithically integrated with AlN contour-mode resonators. The dual-beam switch design presented in this paper intrinsically compensates for the residual stress in the deposited films, requires low actuation voltage (5-20 V), facilitates active pull-off to open the switch and fast switchin...

Radio-frequency (RF) micro-electro-mechanical-system (MEMS) switches are widely used in communication devices and test instruments. In this paper, we demonstrate the structural design optimization of a novel RF MEMS switch with straight top electrode. The insertion loss, isolation, actuator voltage, stress distribution optimized explored simultaneously by HFSS COMSOL software, taking into accou...

Title of Dissertation: OPTIMAL MEMS PLATE DESIGN AND CONTROL FOR LARGE CHANNEL COUNT OPTICAL SWITCHES Yuan Ma, Doctor of Philosophy, 2004 Dissertation Directed By: Professor Robert W. Newcomb, Department of Electrical and Computer Engineering The design and control of an optimal mirror plate actuator suitable for large channel count MEMS optical switch applications is researched. An optimal pla...

Some applications of RF MEMS switches, such as aircraft condition monitoring and distributed satellite communication, present a unique challenge for device design and reliability. This article examines these switches when operational temperatures in the range 60°C to 100°C are envisioned. The basic operation of a capacitive MEMS switch is described and two tools for examining device reliability...

This paper describes the significance of iterative approach and structure damping analysis which help to get better performance validation shunt capacitive RF MEMS switch. The micro-cantilever based electrostatic ally actuated switch is designed after multiple iterations on cantilever a modification obtained that requires low actuation voltage 7.3 V for 3 ?m deformation. To validate we have per...

This paper presents the parametric optimization of Symmetric Toggle RF MEMS Switch (STS), particularly for reduction of overall dimensions and improvement in isolation and insertion loss. The variations in device topology, especially the connecting lever length demonstrates a significant change in resonance frequency and overall device dimensions. The impact of multilayer metal structures used ...