Design and construction of a capacitor sensor with a precise readout system are described in this paper. A variable air-gap capacitive transducer was constructed and for signalmeasurement a successful attempt was made to exploit the capacitance changes in terms of the phase angle of the detected signal. The reported setup makes it possible to detect capacitance changes of the order of 2.5 fF in...

Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever...

We present a study investigating the electrochemical interface as a capacitive transducer for ultrasound sensor applications. The concept is demonstrated using a nanoporous Au layer as a sensing electrode. The sensing electrode was produced by dealloying of the Ag0.8Au0.2 bulk electrode yielding an Au layer with extremely high surface/volume ratio. This electrode configuration was tested agains...

Recent years have witnessed an improvement in the energy efficiency of capacitive sensor interfaces by more than three orders magnitude. This article reviews architectural and circuit innovations that contributed to this progress. The fundamental limit on consumption is discussed, as well widely used figure-of-merit (FoM). Interfaces based period modulation feature simple circuitry, but their p...

The market for interactive platforms is rapidly growing, and touchscreens have been incorporated in an increasing number of devices. Thus, the area of smart objects and devices is strongly increasing by adding interactive touch and multimedia content, leading to new uses and capabilities. In this work, a flexible screen printed sensor matrix is fabricated based on silver ink in a polyethylene t...

Temperature variations are one of the most crucial factors that need to be compensated for in MEMS sensors. Many traditional methodologies require an additional circuit compensate temperature. This work describes a new active temperature compensation method capacitive strain sensors without circuits. The proposed is based on complement 2-D structure design. It consumes zero-power, which essenti...