the aim of the paper is to analyze electro-thermo nonlinear vibration of a double-piezoelectric composite microplate-system (dpcmps) based on nonlocal piezoelasticity theory. the two microplates are assumed to be connected by an enclosing elastic medium which is simulated by pasternak foundation. both of smart composite microplates are made of poly-vinylidene fluoride (pvdf) reinforced by zigza...

This article presents the dynamic behavior of a semi-infinite interfacial crack in piezoelectric bimaterials under impact loading. With help transform methods (the Laplace transforms and Fourier transforms), problem is studied with Wiener–Hopf technique. strict proof guarantees feasibility this approach. The stress intensity factor electric displacement propagation characteristics are expressed...

The following work reports the design, numerical, analytical and simulation characterization of an Aluminum Nitride MEMS resonator. The paper offers a comparison of rectangular plate MEMS resonator (length extensional and width extensional mode shapes) and ring shape MEMS resonator. It also demonstrates the contour Eigen modes of resonators and their equivalent electric circuit model (BVD). Fur...

We investigate a hybrid electro-optomechanical system that allows us to realize controllable strong Kerr nonlinearities even in the weak-coupling regime. We show that when the controllable electromechanical subsystem is close to its quantum critical point, strong photon-photon interactions can be generated by adjusting the intensity (or frequency) of the microwave driving field. Nonlinear optic...

A composite structure of piezoelectric particles and soft polymer materials is a promising component vibration energy harvesters. However, the harvesting behavior which originates from ceramic inside has not been clarified. In this study, (Na,K)NbO3/polyimide composites sheets with NKN fraction 0–40 vol% were fabricated open-circuit voltage was measured. The increased nonlinearly 0.72 to 2.21 V...

Abstract AlN film bulk acoustic wave (BAW) resonators and filters that operate at frequencies above 5 GHz are required for 5G beyond communication applications. However, the power-handling capability, Q factor, electromechanical coupling in high-frequency BAW will be degraded as a result of significantly reduced thickness volume devices. Higher-order mode with polarity inverted (PI) multilayere...

Finite element method (FEA) has been used to calculate the thickness resonance frequency and electromechanical coupling coefficient kt for 2-2 piezocomposite transducers. The results are compared with that of the effective medium theory and also verified by experiments. It is shown that the predicted resonance frequencies from the effective medium theory and the unit cell modeling using FEA dev...

The CuO modified (Na0.52K0.48)NbO3 (NKN) piezoelectric ceramics were prepared by a solid-state reaction method. On the one hand, CuO doping can improve the densification behavior and simultaneously promote the grain growth, however, has little effect on the Curie temperature. On the other hand, the mechanical quality factor Qm obviously increases, the dielectric loss tanδ decreases, and the pie...

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive sputtering. The top Cr layer is used both as a mask to etch the AlN thin films and as an electrode ...

This paper reports on design, fabrication and experimental testing of a new class of two-port stacked piezoelectric aluminum nitride contour-mode micromechanical resonators that can be used for RF filtering and timing applications. This novel design consists of two layers of thin film AlN stacked on top of each other and excited in contour mode shapes using the d31 piezoelectric coefficient. Ma...